Copyright: TM-1000 Help
Citation: Copyright (C) Hitachi High-Tech Science Systems Corporation. 2005, 2006. All rights reserved.


Cautions for handling

  Caution on Use of Computer
  Measure against Abnormal End of Program
  Image Data File

1.  Caution on Use of Computer

(1)  Select an appropriate operating environment.
For correct operation and startup of this software, confirm the following environment setting.

(a)  Account changeover and logon
This software does not allow logon to the computer with multiple accounts for shared use.  For use with a different account, first terminate this software, and then change over to the desired account.  When this software is used with multiple accounts, it may not run or start normally.

(b)  Setting of display properties
For display properties (Control Panel - Display), set desktop area at 1024 x 768 pixels and color pallet at High Color (16-bit) at least.  Other settings will not ensure proper image display.

*  It enters the state that does not start the control application, and is small the image or grows dim when the display resolution of PC is changed to the settings other than 1024x768 pixels.
When SXGA (1280x1024 pixels) and the high resolution monitor such as SXGA+ (1400x1050 pixels) are used, the display of the observation screen is displayed small.  Further, the display of the observation screen might grow dim when those monitors are set as stretch mode.

(c)  Setting of screen saver
Set screen saver in None status.  If screen saver starts, command communication between the PC and microscope is interrupted, so this software may not operate and start properly.

(d)  Setting of power management
For power management of the PC, turn power saving mode to OFF.  And during startup, avoid setting the PC in the standby/halt mode.  Otherwise, command communication between the PC and microscope is interrupted, so this software may not operate and start properly.

(e)  User authority for Windows(R)
Log on to the computer at an authorization level of Administrator (manager).  If you log on to the computer at a limited user authority, this software may not run normally.

(f)  Use of virus check program
Operation of this software may be adversely affected by a virus check program depending on its kind.

(2)  Handling of removable disk

(a)  Caution on saving image onto removable disk
After accessing a removable disk such as floppy disk, wait for some time (5 seconds or longer) after the access lamp goes out, and then extract such a disk.  If the disk is ejected shortly after accessing it, the next image saving or the like operation may become impossible for a few minutes.

(b)  Writing on CD-R/RW drive
While an image is observed, data should not be written on a CD-R/RW drive.  Also, if other application software is activated, the image may be disturbed.

(3)  Use of notebook computer

(a)  Handling of connecting cable (USB cable)
After connecting the USB cable to the TM-1000 main unit and turning on the power supply to it, the software should be started.  Depending on each timing of turning on the power supply to the main unit and starting up a notebook computer, the main unit may not be recognizable correctly by the notebook computer though this is a rare case.  In this case, shut down the notebook computer and turn off the power supply to the main unit, and then restart the system.

(b)  When multiple USB ports are used
When data is accessed using multiple USB ports during startup of this software, an image under observation may be disturbed.  In addition, this software may not run normally.  During startup of this software, avoid a processing which will apply a load to the CUP of the notebook computer.

(c)  Use of printer
Avoid data output to a printer during image observation.  Otherwise, an image under observation may be disturbed.  Furthermore, this software may not run normally.  Data output to a printer should be issued after closing this software.

(d)  Simultaneous use with other application
While this software is activated, other application software should not be started.  If simultaneous use is attempted, an image under observation may be disturbed.  Furthermore, this software may not run normally.

(e)  Recognition of USB driver
After connection of the USB cable to a different USB port of notebook computer, installation of a USB driver may be requested due to Windows(R) Plug and Play function.  So the driver should be installed from the furnished install CD.

2.  Measure against Abnormal End of Program

(1)  If connection between the TM-1000 main unit and PC is cut off during image observation (because power supply to the main unit is turned off or the USB cable slipped off), this software may not run normally.  In this case, shut down the PC and turn off the power supply switch of main unit.  Then, restart the system.

(2)  If the program caused an abnormal end due to an error, etc. during image observation, the electron beam may still be emitted from the electron gun (HV-ON status may be maintained).  In this case, shut down the PC and turn off the power supply switch of TM-1000 main unit.  Then, restart the system.

3.  Image Data File

(1)  A saved image data file has the same name of an image data file of Windows(R) BMP file format and it is an additional information file with an extension code of .txt.  Moving, renaming, deletion, etc. of this file are allowed using Windows(R) Explorer.

(2)  When a bit-map image is pasted to Microsoft(R) Word by dragging it from Explorer, the aspect ratio of the image may become improper.  So use Menu/Insert/Picture.

(3)  A magnification value embedded in a saved image data file is based on an image displayed on the observation window (monitor) of this program.  This magnification value is different from the actual one.

*  Microsoft(R), Microsoft(R) Windows(R) and Microsoft(R) Word are registered trademarks and a trademark of Microsoft Corporation in the U.S.A. and other countries.

*  Information in this contents may be subject to change without notice.


Preparation

[NOTE]:
Carry out connection of cables with the power switch of the control unit turned off.

(1)  check the connection of the control unit to the main unit.

i)  Make sure that three cables that are extending from the bask side of the control unit are connected to the respective connectors placed on the back of the main unit.

ii)  Make sure that the evacuation tube extending from the bask side of the main unit is connected to the diaphragm pump, and a screw of connector is fastened something tightly.

iii)  Make sure that power cable and signal cable are connected to each connector of the diaphragm pump.

iv)  Connect a power cable of control unit to an outlet (3 P) of users installation site.

(2)  check the connection of the control unit to PC with USB cable.

i)  Connect a power cable of the PC to the power outlet on the back side of the control unit.

ii)  Connect a USB cable extending from the control unit to a USB port of the PC.


Starting-up instrument

(1)  Turn on the power switch of the control unit.

(2)  When the EXCHANGE switch of main unit is already lit in green, evacuation will start automatically.  When the EXCHANGE switch is lit off, press the switch to start evacuation.

(3)  LED lamps will light up.  LED lamps indicates the current state in the specimen chamber. (The chamber is in either one of the three states described below.)

  Red (AIR) :  Chamber open to the atmospheric air (Specimen changeable state).

  Yellow (LOW) :  Under evacuation

  Green (READY) :  Evacuation completed and observation can be started.

(4)  Turn on the PC.

(5)  The control application starts.

[NOTE]:
Make sure the control unit and PC are connected by a USB cable.  The TM-1000 application software cannot be started if they are not connected properly.  Also, when the power switch of the control unit is turned off, the application will not start.


Operating the EXCHANGE switch

(1)  Click the Stop button on the operation window to terminate observation.

[Caution!]:
Ventilating the specimen chamber before termination of observation may cause a damage to the filament.

(2)  When the EXCHANGE switch is lit in green, press the switch once to ventilate the specimen chamber, and wait until the chamber is open to the atmospheric air.

(3)  After making sure the chamber is open to the atmospheric air, draw out the specimen stage and pull out the specimen holder from the holder base.  Refer to Attaching a specimen for replace the specimen.

(4)  While holding the specimen stage, press the EXCHANGE switch. When evacuation is over, specimen exchange is completed.

(5)  The progress of evacuation is also indicated in the PC control application. (Upon completion of evacuation, the dialog box disappears.)  When evacuation is completed, the Start button on the operation window becomes active.


Preparing a specimen

(1)  Stick a conductive double-sided tape to the specimen stub.

(2)  Stick a specimen onto the tape.

(3)  Attach the above-prepared specimen holder to the height adjustment screw.


Adjusting specimen height

(1)  A unit of the specimen holder is shown below.

[NOTE]:
Wash your hands before handling the specimen holder to prevent any dust and contaminantes from sticking to the holder.

(2)  Place the specimen holder on the specimen height adjustment jig to adjust the height.

[CAUTION]: ATTENTION TO FALL
Carefully prevent the specimen height adjustment jig from falling on the floor.  The jig may bounce against your body and it may cause injury.

(3)  Adjust the height of the holder so that the clearance between the topmost point of specimen and the lower face of gauge becomes about 1 mm (within 0.5 to 1.5 mm) as shown below.

(4)  For adjustment, loosen the upper lock nut and set an appropriate height by turning the height adjustment screw, then fasten the upper lock nut to the lower lock nut.


Attaching a specimen

(1)  After making sure the chamber is open to the atmospheric air, draw out the specimen stage and pull out the specimen holder from the holder base.

(2)  Replace the specimen with the one to be observed next. Push the height-adjusted specimen holder into the holder base of the stage. (Refer to Adjusting specimen height.)

(3)  The specimen needs to be placed at the center of stage. By turning the X and Y knobs, move the stage so that the tip of position guide comes to the center mark (crosshairs) as shown below.

(4)  Insert the specimen stage. It should be closed slowly so that the specimen or specimen holder will not touch the top face of entrance.

[NOTE]:
The height of specimen holder must be readjusted according to Adjusting specimen height if the specimen or specimen holder touches the top face of entrance as shown below.


EXCHANGE switch operation for finishing observation

(1)  Take out the observed specimen if it will not be observed again in succession.

(2)  Before shutting down the instrument, make sure the specimen chamber is evacuated (image observable state).

[NOTE]:
Even when no observation is conducted for a long time, the specimen chamber needs to be kept in the evacuated state. For this purpose, start the instrument at least once every other week to evacuate it and then shut down the instrument.


Shutting down instrument

(1)  Terminate the control application of PC.

(2)  Shutting down PC.

(3)  Turn off the power switch of the control unit to shut down the instrument.

[NOTE]:
Before shutting down the instrument, control application of PC must be terminated.


Standard Operation Procedure

Shown below is a procedure flow of basic operations of TM-1000.

(1)  Preparation
  Preparation	  Starting-up instrument
  Starting control application program

(2)  Specimen exchange
  Specimen exchange

(3)  Starting observation
  Starting observation

(4)  Basic operations
  Basic operations for image observation

(5)  Saving image
  Saving image

(6)  Finishing observation
  Finishing observation	  EXCHANGE switch operation for finishing observation
  Terminating application program	  Shutting down instrument

Refer to Menu and operation for operations available on operation window.


Specimen exchange

General procedure of specimen exchange is shown below.

  Preparing a specimen
  Adjusting specimen height
  Operating the EXCHANGE switch
  Attaching a specimen


Basic operations for image observation

General procedure for observing a sample is shown below.

  Setting view mode
  Choosing observation mode
  Adjusting brightness and contrast of an image
  Adjusting focus coarsely
  Selecting observation field
  Setting magnification
  Adjusting focus finely
  Correcting astigmatism

Refer to Menu and operation for operations available on operation window.


Saving image

Operations for saving an image and checking the saved image are described below.

  Checking settings for save
  Executing standard save
  Executing quick save
  Checking saved image data

Refer to Menu and operation for operations available on operation window.


Starting control application program

[NOTE]:
Make sure the control unit and PC are connected by a USB cable.  The TM-1000 application software cannot be started if they are not connected properly.  Also, when the power switch of the control unit is turned off, the application will not start.

(1)  Select TM-1000 from the Start menu, or double click the TM-1000 shortcut icon on the desktop.

(2)  The control application starts.

[NOTE]:
When the control application program is started for the first time after the installation, following message will be displayed.  Click [OK] button.


Terminating application program

[NOTE]:
Before shutting down the instrument by turning off the power switch of the control unit, terminate the control application program.

(1)  On the operation window of PC application, click the Stop button to turn off the electron beam (set HV-OFF status).

(2)  Click the title bar button [X] at the top right of the operation window or select Exit from the File menu.

(3)  A dialog box for confirming the termination of the application will appear.

(4)  Click the [OK] button to terminate the application, or click the [Cancel] button to cancel the termination of the application.

(5)  The control application program is shutting down.  Wait for some time.


Starting observation

(1)  Click the Start button on the operation window or select Start(HV-ON) from the File menu.

(2)  To start observation, electron gun power supply will be turned on (HV-ON) to flow a current through the filament.  During which a window appears to indicate that this process is in progress.  Wait for a time.

[NOTE]:
Auto start mode activates auto focus and auto B/C in succession, and an image appears in the observation area. (The auto start mode will be initiated only at start immediately after specimen exchange or upon start of the PC control application.)  Refer to the start button for Auto start Function.

(3)  When electron beam have been emitting, the Start button is turned into the Stop button.


Finishing observation

(1)  Click the Stop button on the operation window or select Stop(HV-OFF) from the File menu, and electron gun power supply will be turned off (HV-OFF) to stop the flow of a current through the filament.

(2)  When electron beam is turned off, the Stop button is turned into the Start button (HV-OFF status).


Setting view mode

Set the view mode to Fast and find a target field of observation.  Change the view mode to Reduce to adjust image brightness and focus.  Repeat these procedures for observation.  There are two ways to select the view mode.

  Click either one of the view mode buttons above the image observation area.

The current view mode is indicated in Yellow.  Change the view mode as required.

  Or select from View Mode of the View menu

Select either one of Fast, Slow, Reduce, or Freeze.  The current view mode is marked with a check mark.


Choosing observation mode

Select an observation mode that is suited for the specimen.  Observation mode can be selected from Observation Mode in the Setting menu.  The current observation mode is marked with a check mark.

A usual specimen such as industrial material can be observed in Standard Mode.  However, when brightness/contrast changes or an image shift occurs during observation in the standard mode due to moisture contained in a specimen such as biological one, Charge-up Reduction Mode should be employed.


Adjusting brightness and contrast of an image

Image brightness and contrast can be adjusted manually or automatically.

  Manual adjustment

Click the + side of Brightness button for brightening an image, and the - side for darkening the image. And for intensifying image contrast, click the + side of Contrast button, and the - side for lowering it.  When each button is kept pressed, brightness/contrast changes continuously and quickly.

  Auto adjustment

Click the Auto B/C button or select Auto B/C from the View menu, and brightness and contrast will be automatically adjusted.

*  the process of finding a target field of observation, you will change magnification and field frequently.  And as you change them, image brightness or contrast may change accordingly.  For facilitating this process, you can click the auto B/C button to keep balance roughly so that an image is easier to see.  After determination of the field and magnification, you can fine-adjust the brightness and contrast manually with respective buttons.


Adjusting focus coarsely

Focus can be adjusted manually or automatically.

  Manual adustment

Click the + or - side of this button to change focus, or keep pressing button to change focus continuously and quickly.

  Auto adjustment

Click the Auto Focus button or select Auto Focus from the View menu, and focus will be automatically adjusted.

*  accuracy of auto focus is affected by the surface structure of a specimen.  If contrast is low because the surface of a specimen lacks structural characteristics or a specimen is apt to be charged, auto contrast may not function properly.  In this case, focus should be adjusted manually.

  Return to reference focus level

Click the Focus Reset button or select Focus Reset from the view menu, and focus will return to the reference focus level which was preset in a factory.


Selecting observation field

(1)  Turn the X/Y knobs of specimen stage to select observation field optimum for the specimen.

  The X knob of specimen stage

The image under observation moves to the right when turning the X knob (at front left) of specimen stage clockwise. Turning the knob counterclockwise moves the image to the left.

  The Y knob of specimen stage

The image under observation moves toward the bottom when turning the Y knob (at front right) of specimen stage clockwise. Turning the knob counterclockwise moves the image toward the top.

[NOTE]:
At any rotation angle other than 0, image moving directions are different from the ones described below.  Therefore, first set rotation at 0 and move image field as instructed below.

(2)  Operate the Image rotation to select observation field optimum for the specimen.
The Image rotation refers to a function for rotating a displayed image by rotating the scanning direction of electron beam. When image rotation angle is adjusted appropriately, a clear-cut image can be acquired.

  Returning to 0°
Click [image] mark of the Rotation button, and an image without rotation will appear.  An image orientation orthogonal to the direction from the front to rear of the main unit corresponds to 0 (reference position). At this position, operations of the specimen moving knobs match the image moving directions.

  Rotating 180 from the present rotational position
Click [image] mark, and an image after 180 rotation from the present rotational position will appear.

  Rotating 90 clockwise from the present rotational position
Click [image] mark, and an image after clockwise 90 rotation from the present rotational position will appear.

  Rotating 90 counterclockwise from the present rotational position
Click [image] mark, and an image after counterclockwise 90 rotation from the present rotational position will appear.

  Finely adjusting rotational position
Clicking the [image] mark rotates an image clockwise and clicking the [image] mark rotates it counterclockwise.  Holding down the button rotates an image continuously and quickly.


Setting magnification

There are three ways to set magnification.

  Click the Magnification button

Click the + side of this button to raise and the - side for lower the magnification.  Magnification changes step by step. When you keep the button pressed, magnification changes continuously and quickly.

  Click the Preset button

Once a magnification value which is advantageous for finding a proper field of view and that for saving an image are assigned to the two Preset buttons, these magnifications are selectable just by clicking the respective buttons.

  Select magnification from View menu
Select a magnification from Magnification in the View menu.

Or select either magnification from Preset Magnification in the View menu.  Magnification will change to the selected value.

[NOTE]:
When magnification is raised from a low level to a far higher level, the image field narrows, and brightness, contrast and focus change.  If an image is not easy to view after magnification change, you should click the auto B/C button, and then click the auto focus button so that the image is easier to view.


Adjusting focus finely

In observation at a high magnification, focus needs to be adjusted finely.

(1)  Bring the image of the specimen area to be focused to the center of image observation area and click the “Reduce” button of view mode selection buttons.  Image field will be restricted within an area around the center.

(2)  Move the mouse cursor into the image observation area.  Cursor display changes to the one for focus adjustment.

(3)  Drag the mouse to the left (-) and right (+) with its left button held down, and focus will be finely adjusted.  As observing the image, adjust its focus to the optimum level.

(4)  This correction is required when an image is astigmatic because the electron beam projected to the specimen surface is not circular.
  Correcting astigmatism


Checking settings for save

Check the information to be saved together with the image.  (If no change is desired on the information from the previous saving operation, this check is unnecessary.)

(1)  Click the Edit button in the information/comment area or select Setting for Save from the File menu.

(2)  The Setting for Save window will appear. Check the information items to be displayed, edit comment and select image type and file name for saving.

(3)  Settings will be applied by clicking the [SET] button. Clicking the [OK] button determines your settings and closes this window.


Executing standard save

A high-resolution image is saved.
Image saving size: 1280 x 960 pixels (image only), 1280 x 1040 pixels (image + information) and 1280 x 1100 pixels (image + information + comment)
Image type: JPEG file (*.jpg), Bitmap file (*.bmp), TIFF file (*tif)

(1)  Click the Save button or select Save from Save Image in the File menu.

(2)  Once saving process begins, the displayed image darkens and then the image to be saved is displayed again gradually from the top (this process is called Image capture). Image capture will be completed in approximately 30 to 40 seconds.  During image capture, a dialog box appears at the center of the image observation area, indicating the progress of image capture. On completion of the image capture, the dialog box disappears. To cancel image saving, click the [Cancel] button in the dialog box.

[NOTE]:
During image capture, pay attention not to give vibrations to the main unit.  Otherwise, noise may appear on the saved image.

(3)  After the image capture, the data saving window appears. Specify its destination to save and a file name, select type of the image, and click [Save] button to complete saving procedure.  After saving, view mode is set to Freeze.


Executing quick save

With quick save, an image will be saved as it appears on the observation area.
Image saving size: 640 x 480 pixels (image only), 640 x 520 pixels (image + information) and 640 x 550 pixels (image + information + comment)
Image type: JPEG file (*.jpg), Bitmap file (*.bmp), TIFF file (*tif)

(1)  Click the Quick Save button or select Quick Save from Save Image in the File menu.

(2)  View mode is set to Freeze. (The image under observation is paused.)  During image pausing, a dialog box appears at the center of the image observation area. And after the image is Frozen, this dialog box disappears. To cancel image saving, click the [Cancel] button in the dialog box.

[NOTE]:
When quick saving has been started in view mode Fast or Reduce, halfway cancellation is not allowed. And when quick saving has been started in view mode Freeze, the dialog box does not appear.

(3)  View mode changes to Freeze image and the data saving window opens. Input the destination to save and a file name and select type of the image for saving.  After saving, view mode is set to Freeze.


Checking saved image data

Display a list of saved images using Windows(R) Explorer.

(1)  Press the [F9] key on the keyboard.

(2)  The folder where an image was saved in the last saving operation will be opened.

[NOTE]:
When saved images are represented by icons in the folder, select Filmstrip or Thumbnails from the View menu of the folder. Saved images will be listed in the folder.


Correcting astigmatism

(1)  Select Yes from Astigmatism Correction in the Setting menu.

(2)  The astigmatism correction field appears over the information/comment area.

(3)  Set image focus to the state (A) shown above by focus adjustment.  Position (A) corresponds to the central position in image drifting between two directions orthogonal to each other.

(4)  Move each bar of Astigmatism 1 and Astigmatism 2 so as to obtain a just-focus image. For confirmation, fine-adjust image focus across the just-focus point. When the image does not drift, astigmatism correction is completed.


Method of beam axis alignment

After replacement of a filament, carry out beam axis alignment according to the procedure below.

  Starting axis alignment
  Step 1
  Step 2
  Step 3
  Step 4
  Step 5
  Finishing axis alignment


Performance check

After filament replacement, wehnelt cleaning or anode cleaning, carry out beam axis alignment and performance test check.

  Method of beam axis alignment	  Method of Performance check


Starting axis alignment

(1)  Press the EXCHANGE switch for ventilating the specimen chamber when the green LED lights up.

(2)  Detach the top cover of the Model TM-1000 main unit as follows.  Hook fingers of one hand in the groove and raise the cover while slightly pulling toward you.  Hold the upper face of the raised top cover with the other hand and pull out the cover toward the front top of the instrument until it is separated.  Then proceed to filament replacement.

[CAUTION!]:  Attention to Fall
Carefully prevent the top cover from falling on the floor, etc.  If the cover bounces against your body, you may be injured.

(3)  Place the reference sample at the center of the specimen stage.

(4)  Close the specimen stage and evacuate the specimen chamber by pressing the EXCHANGE switch.  When the green LED lights up, evacuation is completed.

(5)  Start the PC application program and the Beam Axis Alignment mode.

i)  On the operation window of PC application, click the Start button to emit the electron beam (set HV-ON status ).

ii)  Select Beam Axis Alignment from the Maintenance menu.

iii)  A check message is now displayed as shown below.  So, insert the furnished image check specimen and click the [OK] button.  The Beam Axis Alignment window will open.

iV)  Beam axis alignment window is shown, and electron beam conditions are being set.  Wait for some time.

[NOTE]:
Beam axis can be aligned only while the electron beam is emitted ( HV-ON status ).

*  During beam axis alignment, the specimen stage in the main unit should not be operated.  Otherwise, beam axis alignment may become impossible.


Step 1

At STEP 1, a condition for projecting the beam over a broad range is set, so an image is easier to appear on the observation window (there may be cases where no image appear).  Turn the four axial alignment screws A, B, C and D of electron gun for moving it to the position where an image appears or brightens.

(1)  First of all, loosen the four screws A, B, C and D by about 1/4 revolution.

(2)  Next, turn any one screw (for example, A in the above figure) in the tightening direction.  When the screw becomes hard to turn, loosen the screw on the opposite side (screw C in the figure) and turn A further in the tightening direction.  The screws should be turned while checking the display.  When an image appears, adjustment is required in the direction where the image brightens.

*  During beam axis alignment, the specimen stage in the main unit should not be operated.  Otherwise, beam axis alignment may become impossible.

(3)  When an image in the observation area is formed like the reference image, you should click the [STEP2] button for advance to STEP 2.

[NOTE]:
The reference image is an example.  Your image need not be completely the same as the reference one.

(4)  During condition setting, the following message is reported.  Until this message disappears, axial alignment should be avoided.


Step 2

(1)  At STEP 2, the set condition of electron gun has been changed from that in STEP 1, so the bright area of the image is different.  Turn the four axial alignment screws A, B, C and D of electron gun for moving it to the position where an image appears or brightens.

*  During beam axis alignment, the specimen stage in the main unit should not be operated.  Otherwise, beam axis alignment may become impossible.

(2)  When the image in the observation area has become like the reference image after axial alignment, you can click the [STEP3] button for advance to STEP 3.  Or if the image in the observation area has become dark, return to STEP 1 by clicking the [STEP1] button and carry out axial alignment again.

[NOTE]:
The reference image is an example.  Your image need not be completely the same as the reference one.  There is no need for making the inside of this circle evenly bright.


Step 3

(1)  Every step advance entails a change in the bright area.  Therefore, move the electron gun by turning its four axial alignment screws A, B, C and D so that the gun is adjusted to the position where the image becomes the brightest.

*  During beam axis alignment, the specimen stage in the main unit should not be operated.  Otherwise, beam axis alignment may become impossible.

(2)  Align the axes so that the bright area becomes a circle.  When the profile of the circle is formed like the image shown below, you can advance to STEP 4 by clicking the [STEP4] button.  Or if the image in the observation area has become dark, return to STEP 2 by clicking the [STEP2] button and carry out axial alignment again.  There is no need for forming a round image.

[NOTE]:
The reference image is an example.  Your image need not be completely the same as the reference one.


Step 4

(1)  Every step advance entails a change in the bright area.  Therefore, move the electron gun by turning its four axial alignment screws A, B, C and D so that the gun is adjusted to the position where the image becomes the brightest.

*  During beam axis alignment, the specimen stage in the main unit should not be operated.  Otherwise, beam axis alignment may become impossible.

(2)  Align the axes so as to brighten the inside of the circle.  When the whole inside has become white as shown below, you can advance to STEP 5 by pressing the [STEP5] button.  Or if the image in the observation area has become dark, return to STEP 3 by clicking the [STEP3] button and carry out axial alignment again.

[NOTE]:
The reference image is an example.  Your image need not be completely the same as the reference one.


Step 5

(1)  At STEP5, auto B/C adjustment and auto focus have been carried out, and a sharp image is presented in the observation area.

(2)  Move the electron gun by adjusting its four axial alignment screws A, B, C and D finely so as to find the position where image brightness is even and the highest.

*  During beam axis alignment, the specimen stage in the main unit should not be operated.  Otherwise, beam axis alignment may become impossible.

(3)  When the image in the observation area has become similar to the reference image after axial alignment, you should tighten the axial alignment screws slightly to fix the electron gun.  The four screws should be tightened evenly and gradually while paying attention not to change the brightness.  Terminate beam axis alignment by clicking the [END] button.  Or if the image in the observation area has become dark, return to STEP 4 by clicking the [STEP4] button and carry out axial alignment again.

[NOTE]:
The reference image is an example.  Your image need not be completely the same as the reference one.


Finishing axis alignment

(1)  Electron beam conditions are being set.  So wait for some time until the Beam Axis Alignment window disappears.

(2)  Close the top cover of the Model TM-1000 main unit as follows.

[CAUTION!]:  Attention to Fall
Carefully prevent the top cover from falling on the floor, etc.  If the cover bounces against your body, you may be injured.


Method of Performance check

Image check after filament exchange, etc. should be carried out with the furnished image check specimen set in the specimen stage.  Also check the image in this way if you notice an image deterioration in use of the same instrument.

(1)  Set the furnished image check specimen at the reference position.  For setting method, refer to Attaching a specimen.

(2)  Close the specimen stage and evacuate the specimen chamber by pressing the EXCHANGE switch.  When the green LED lights up, evacuation is completed.

(3)  On the operation window of PC application, click the Start button to emit the electron beam (set HV-ON status ).

(4)  Carry out brightness and contrast adjustment, focus adjustment and astigmatism correction.  Then, the furnished image check specimen will be imaged at 5000x as shown below.

[NOTE]:
As the objective lens aperture or condenser lens aperture comes to be contaminated, astigmatism increases and such an image as above may not be obtainable.  In this case, the apertures should be renewed.  For replacement method, refer to the Objective lens aperture unit replacement and the Condenser lens aperture replacement.


Maintenance

Some parts of TM-1000 require regular replacement or cleaning.  Refer to Consumable replacement for details about replacement of filament and lens aperture, and Electrodes cleaning for cleaning of a wehnelt and an anode.

  Consumable replacement	  Electrodes cleaning
  TMP(Turbo Molecular Pump) running in mode

  Consumables list	  List of parts which require cleaning
  About instrument overhaul


Consumable replacement

Replace consumables according to the procedure below.

  Filament replacement
  Condenser lens aperture replacement
  Objective lens aperture unit replacement


Electrodes cleaning

Carry out cleaning according to the procedure below.

  Wehnelt cleaning
  Anode cleaning


Consumables list

The parts listed below require regular replacement.  Refer to Consumable replacement for timing and method of replacement.

  Consumables

* When observation is conducted constantly in standard mode, the life of a filament is about 30 hours and about 20 hours in charge-up reduction mode. If a filament burned out, replace it with a new one.

* These "Part No." might be changed, Please contact service agent to when buy it.


List of parts which require cleaning

The parts listed below require regular cleaning.  Refer to Consumable replacement or Electrodes cleaning for timing and method of cleaning.

  Parts which require cleaning

  Cleaning supplies (regular stock)
Cleaning supplies are listed below.  Make sure to always have the required number of cleaning supplies.

* These "Part No." might be changed, Please contact service agent to when buy it.


About instrument overhaul

Parts which require replacement and overhaul are two vacuum pumps and a vacuum vinyl piping to keep chamber evacuated, and a filter to prevent foreign bodies from entering into the instrument.  Replacement timing is around five years, but it will differ depending on hours of use.  Note that replacement and overhaul are addressed by its maker at your expense.

  Parts which require replacement and overhaul

* These "Part No." might be changed, Please contact service agent to when buy it.


Filament replacement

(1)  Expose in the atmospheric air for cooling half an hour or longer.

[CAUTION!]:  Burns
If the filament burned out during image observation or any instrument operation, attention should be paid because the filament and nearby parts are still hot.  If replacement is attempted shortly after filament discontinuation, you may receive burns.  Turn off the power switch of control unit and wait at least half an hour until the filament is cooled down.  Then proceed to its replacement.

(2)  Prepare a new filament and nylon gloves.

(3)  Detach the top cover of the Model TM-1000 main unit as follows.  Hook fingers of one hand in the groove and raise the cover while slightly pulling toward you.  Hold the upper face of the raised top cover with the other hand and pull out the cover toward the front top of the instrument until it is separated.

[CAUTION!]:  Attention to Fall
Carefully prevent the top cover from falling on the floor, etc.  If the cover bounces against your body, you may be injured.

(4)  The black knob screw at the front should be loosened.

(5)  After waiting at least half an hour for cooling, turn on the power switch of control unit and press the EXCHANGE button to ventilate the specimen chamber.

(6)  Open the electron gun as follows.

(7)  Before loosening the cap, put on the prepared nylon gloves.

(8)  Remove the Wehnelt and cartridge filament.  Pull up the Wehnelt, and it will be removed together with the cartridge filament.

(9)  The cartridge filament and the Wehnelt are fastened by a screw.  Loosen the screw for separating the Wehnelt.

(10)  Check the removed Wehnelt for contamination (discoloration).  If the Wehnelt is in the state shown below, it should be cleaned.  Clean the Wehnelt every 3 to 5 filament exchanges as a standard.

(11)  Attach the Wehnelt to a new cartridge filament.  When the cartridge filament is provided with a copper spacer ring, you should attach the Wehnelt with the ring placed between the cartridge filament and Wehnelt.

[NOTE]:
The tip of cartridge is a filament like an extremely thin wire.  Even a slight contact with the filament may deform it and make it unusable.  Therefore, the Wehnelt should be attached with utmost care.  In particular, carefully avoid touching the nylon gloves.

(12)  Mount the cartridge filament in the electron gun.  Mount the cartridge filament, aligning the pin of guard ring with the groove in the holder section of cartridge filament.

*  The cartridge filament should be inserted vertically into the guard ring.

(13)  Firstly, fasten the Wehnelt and make sure it is not loose.  Then, fasten the cap.

(14)  Make sure the O-ring is coated with grease and no foreign material is stuck to it.  Then, fit the O-ring in the groove.

(15)  Close the electron gun, and tighten the black knob/electron gun fixing screw at the front.  Then, press the EXCHANGE button.  When evacuation is completed, Filament replacement ends.

(16)  Next you should align the beam axis.

(17)  Close the top cover of the Model TM-1000 main unit as follows.

[CAUTION!]:  Attention to Fall
Carefully prevent the top cover from falling on the floor, etc.  If the cover bounces against your body, you may be injured.


Condenser lens aperture replacement

The condenser lens aperture is incorporated in the anode.  This aperture should be renewed when you notice a degradation in image quality (or poor focus) after using the instrument for about 6 months.  It is recommended to renew the objective lens aperture unit together with the condenser lens aperture.

(1)  Natural cooling for half an hour or longer is required at first.

[CAUTION!]:  Burns
When the instrument was operated just before you attempt to replace this aperture, the wehnelt and anode adjacent to the filament are still hot.  If you touch those parts, you may receive burns.  To prevent this, turn off the power switch of control unit, and then wait for half an hour or longer for cooling.

(2)  After waiting at least half an hour for cooling, turn on the power switch of control unit and press the EXCHANGE button to ventilate the specimen chamber.

(3)  Open the electron gun toward the rear and remove the anode.  The anode has been screwed in.  Put on gloves, pinch the anode with fingers and loosen it until removed.  Place the anode on aluminum foil or clean place as it is.

(4)  Pull out the inner tube.

(5)  Disassemble the inner tube and replace the condenser lens aperture with a new one.  Loosen the pipe while holding the top holder.  The condenser lens aperture and retainer are placed between the pipe and top holder.  Replace the aperture with a new one.

(6)  Pinch the circumferential area of the aperture with tweezers in order to protect the central opening area from scratch.  Place the top holder as shown below and drop the aperture into the holder.  Then, put on the retainer and screw the pipe onto the threads of top holder.

[NOTE]:
The condenser lens aperture should be handled carefully, because it is thin and apt to be deformed.  If there is scratch or contaminant in the vicinity of aperture opening, image quality may be degraded.

(7)  Reassemble the inner tube, and then insert it into the inner pipe as the final step.  Set the anode again.

(8)  Make sure the O-ring is coated with grease and no foreign material is stuck to it.  Then, fit the O-ring in the groove.  Close the electron gun, and tighten the black knob/electron gun fixing screw at the front.

(9)  Press the EXCHANGE button.  When evacuation is completed, Condenser lens aperture replacement ends.  Next you should align the beam axis.


Objective lens aperture unit replacement

The objective lens aperture unit is incorporated in the inner pipe.  This aperture unit should be renewed when you notice a degradation in image quality (or poor focus) after using the instrument for about 6 months.  It is recommended to renew the condenser lens aperture together with the objective lens aperture unit.

(1)  Natural cooling for half an hour or longer is required at first.

[CAUTION!]:  Burns
When the instrument was operated just before you attempt to replace this aperture, the wehnelt and anode adjacent to the filament are still hot.  If you touch those parts, you may receive burns.  To prevent this, turn off the power switch of control unit, and then wait for half an hour or longer for cooling.

(2)  After waiting at least half an hour for cooling, turn on the power switch of control unit and press the EXCHANGE button to ventilate the specimen chamber.

(3)  After removing the inner tube, extract the inner pipe using a hexagonal wrench key.  If the pipe is not easy to extract, pull it straight up with both hands.

[NOTE]:
Before removing the inner pipe, the inner tube must be removed.  For removal of the inner tube, refer to the condenser lens aperture replacement.

(4)  Holding the central area of inner pipe, loosen this aperture unit at the leading end with a blade-edge screwdriver until it is removed.  Then, mount a new aperture unit.  Since the opening in the aperture unit is very small, its scratch or sticking of contaminant may degrade image quality.  The aperture unit should be carefully handled so that dust or contaminant will not stick to this unit.

(5)  First, coat the O-ring of the inner pipe sparingly with vacuum grease while spreading it into a thin film by a fingertip.

(6)  Mount the inner pipe in the column.  The next procedure for inner tube insertion and anode mounting should be carried out again.

(7)  Make sure the O-ring is coated with grease and no foreign material is stuck to it.  Then, fit the O-ring in the groove.  Close the electron gun, and tighten the black knob/electron gun fixing screw at the front.

(8)  Press the EXCHANGE button.  When evacuation is completed, Condenser lens aperture replacement ends.  Next you should align the beam axis.


Wehnelt cleaning

Contamination of the wehnelt cause an image deterioration.  The wehnelt should be cleaned every six months when used with normal frequency.

Dissolve the furnished Green Silicone Carbide with alcohol and wet the tip of swab with the alumina solution.  Then clean the wehnelt with the swab.  Finally wipe off Green Silicone Carbide and foreign matter completely using alcohol.


Anode cleaning

Contamination of the anode cause an image deterioration.  The anode should be cleaned every six months when used with normal frequency.

Dissolve the furnished Green Silicone Carbide with alcohol and wet the tip of swab with the alumina solution.  Then clean the anode with the swab.  Finally wipe off Green Silicone Carbide and foreign matter completely using alcohol.


TMP running in mode

TMP(Turbo Molecular Pump) running in mode

It is suggested to choose TMP running in mode if the instrument has not been used for more than 1 month.  This mode is to apply oil evenly to the bearing in TMP.

[CAUTION!]:
Do not turn off the power switch of the main unit while the TMP is under running-in mode.  The TMP may be damaged due to the abrupt termination, and may not run normally.

(1)  Activate TMP running in mode
TMP running in mode can be activated when the vacuum status is in AIR.  Select TMP running in mode from the Maintenance menu.

Following message appears if the vacuum status is in AIR.

The check message appears when [OK] button is clicked.  TMP running in mode can be stopped by clicking [Cancel] button.

TMP running mode starts when [OK] button is clicked.  Close the specimen stage, and hold it gently.

[NOTE]:
Following message appears if the vacuum status is not in AIR.

Please shut the message when clicking the [OK] button, and start TMP running in mode again after making the vacuum status of AIR.

(2)  While TMP running in mode is going on.
Following message appears while TMP running in mode is going on. It takes about 30 minutes.

If stopping TMP running in mode is desired, click [Cancel] button in the message dialogue box.

*  Dependent upon the status in TMP running in mode, [Cancel] button occasionally can not be selected for safe operation.

[NOTE]:
EXCHANGE switch does not work for safe operation while TMP running in mode is going on.  After the completion of TMP running in mode, it comes back to normal condition.

(3)  Completion of TMP running in mode
Following message appears when TMP running in mode has been completed.


Menu and operation

Refer to the contents below for descriptions about operations and functions of TM-1000 application program.

  Menu
  File menu	  Edit menu
  View menu	  Setting menu
  Maintenance menu	  Help menu

  Start/stop operation of observation
  Start button	  Stop button

  Image observation operation
  Image Observation area	  Information/Comment area
  View Mode Selection buttons	  Magnification button
  Preset Magnification button	  Brightness button
  Contrast button	  Auto B/C button (Auto brightness and contrast)
  Focus Adjustment button	  Auto Focus button
  Focus Reset button	  Rotation button
  Fine Focus (Focusing operation on display)

  Saving and checking image
  Quick Save button	  Save button
  Checking Saved image

  Others
  Astigmatism Correction	  Windows for several operations and settings
  Help button	  Edit button
  Minimize button	  Close button

By pressing [F1] key while a mouse cursor is on an operation button, a help content which corresponds to the button will be displayed.


[NOTE]:
When a button operation is prohibited, Help is not displayed by the pressing of [F1] key.


Windows for several operations and settings

Refer to the contents below for description about windows for several operations and settings of TM-1000 application program.

  Setting for Save window	  Setting for Preset Magnification window
  Auto B/C Adjustment window	  Control Sensitivity window
  Digital Zoom window	  Data Entry & Measurement window
  Image Balance window	  Data Saving window
  Beam Axis Alignment window	  Setting-up the Observation Screen Size window
  User Information window	  Version Information window


TM-1000 Help

Help is available on handling methods and operation methods of TM-1000. Select the content which you want to display a help about from the following items.

  Refer to Cautions for handling for cautions for handling TM-1000.
  Cautions for handling

  Refer to Standard operation procedure for operating procedures (specimen exchange, basic operations, image saving) of TM-1000.
  Standard operation procedure

  Refer to Menu and operation for function description of operating window.
  Menu and operation

  Refer to Performance check for methods of beam axis alignment and performance check.
  Performance check

  Refer to Maintenance for descriptions about consumable replacement (filament, lens aperture), parts cleaning and instrument overhaul.
  Maintenance

  Refer to Message list for troubleshooting of TM-1000.
  Message list

- Easy way to display Help
Press [F1] key while a mouse cursor is on an operation button or within an operation area of each window to display a Help which corresponds to the button or the window.

[NOTE]:
When a button operation is disabled, Help will not displayed by the pressing of [F1] key.  And also appropriate Help may not be displayed by the pressing of [F1] key when a mouse cursor is out of operation area of window even though the window is in active state.

*  Information contained in this contents is subject to change without notice for improvement.


Image Observation area

Image to be observed is displayed in this area.  Operations are to be performed while viewing an image displayed in this area.  Also, the image focus can be finely adjusted by dragging with the left mouse button held down within the image observation area.  When fine focus adjustment is allowed in this area, the mouse pointer turns into “FOCUS“ mark.

Note that this adjustment is not allowed when the view mode is set to Freeze or when Start is displayed at the “Start“ button (HV-OFF status).


Information/Comment area

In this area, a scale-bar, observation information (image No., date, time, magnification, observation mode) and comment are displayed.  Each information item and comment can be displayed or hided.  Click the Edit button or select “Setting for Save” from the File menu for setting.  For details of setting, refer to Setting for Save window.

*  Scale-bar cannot be hidden.

*  Upper case “L“ is displayed when you select the Charge-up Reduction Mode during the image observable state (when the specimen chamber is evacuated adequately).


File menu

(1)  Observation

  Start (HV-ON)
To start observation, electron gun power supply will be turned on (HV-ON) to flow a current through the filament.  This process takes about 10 sec, during which a window appears to indicate that this process is in progress.  The Start button also provides the same function.

*  During the Start button is turned into “Stop” ( HV-ON status ), this operation menu is ineffective.

  Stop (HV-OFF)
To terminate observation, electron gun power supply will be turned off (HV-OFF) to stop the flow of a current through the filament.  The Stop button also provides the same function.

*  During the Start button is turned into “Start” ( HV-OFF status ) , this operation menu is ineffective.

(2)  Save Image

  Quick Save
An image under observation will be acquired according to the presently selected view mode and saved as an image file. [Image saving size: 640 x 480 pixels (image only), 640 x 520 pixels (image + information) and 640 x 550 pixels (image + information + comment) ]  A time period taken for image acquisition varies with view mode and a dialog box appears to notify that image acquisition is in progress.  After image acquisition, the data saving window appears.  On this window, specify the destination and a file name and select type of the image to save the image file.  The Quick Save button provides the same function.

  Save
A high-resolution image under observation will be acquired and saved as an image file.  [Image saving size: 1280 x 960 pixels (image only), 1280 x 1040 pixels (image + information) and 1280 x 1100 pixels (image + information + comment)]  Image acquisition takes about 30 to 40 sec, during which a dialog box appears to notify that this process is underway.  After image acquisition, the data saving window opens.  Save the image file by specifying the destination and a file name and select type of the image to save.  The Save button provides the same function.

(3)  Setting for Save…
The Setting for Save window will open.  With this window, information and comment displayed in information/comment area and a saved ( Quick Save or Standard Save ) image output condition (whether or not information/comment is embedded in the saved image file) can be edited.

(4)  Exit
The application will be closed.  The title bar button [X] provides the same function.


Edit menu

(1)  Copy Image
An image under observation will be copied into the clipboard.  This menu item is effective during view mode is set to Freeze. [Image saving size: 640 x 480 pixels (image of the “Quick Save“ ) and 1280 x 960 pixels (image of the “Standard Save” or “Digital Zoom” )]

(2) Data Entry/Measurement…
The Data entry & Measurement Window will open. This menu item is effective during view mode is set to Freeze. Texts and graphics can be added up to 50 items on an observed image. And the distance between two points on the image can be measured. The image with added items can also be saved as an image file. [Image saving size: 640 x 480 pixels (image only), 640 x 520 pixels (image + information) and 640 x 550 pixels (image + information + comment)]

(3)  Digital Zoom…
After acquisition of a high-resolution image under observation, the Digital Zoom window will open.  Image acquisition process is the same as in standard saving A digital zoom image (enlarged by doubling or quadrupling the original image) can be displayed by freely specifying a field to be enlarged on this window.  A digital zoom image can also be saved as an image file. [Image saving size: 640 x 480 pixels (image only), 640 x 520 pixels (image + information) and 640 x 550 pixels (image + information + comment)]


View menu

(1)  View Mode

  Fast
Changes the present view mode to searching the field of view.  Clicking the corresponding view mode selection button provides the same function.

*  When the present view mode is Fast, this menu item is ineffective.

  Slow
Changes the present view mode to image confirmation.  Clicking the corresponding view mode selection button provides the same function.

*  When the present view mode is Slow, this menu item is ineffective.

  Reduce
Changes the present view mode to image adjustment.  Clicking the corresponding view mode selection button provides the same function.

*  When the present view mode is Reduce, this menu item is ineffective.

  Freeze
Changes the present view mode to still image.  Clicking the corresponding view mode selection button provides the same function.

*  When the present view mode is Freeze, this menu item is ineffective.

(2)  Preset Magnification

By selecting either of the two magnifications preset on the setting for preset magnification window, image magnification will be directly changed to the selected one.  The same operation can be performed by clicking the Preset button.

(3)  Magnification

Magnification will be changed to the value selected here.

(4)  Auto B/C
Brightness and constant of the image under observation will be automatically adjusted.  Auto adjustment can be carried out so as to meet the brightness and contrast levels preset on the Auto B/C Adjustment setting window.  The same operation is practicable by the Auto B/C button.

(5)  Auto Focus
The image under observation will be automatically adjusted to a proper focus level.  The same operation is practicable by the Auto Focus button.

(6)  Focus Reset
The image under observation will be reset to the reference focus level set in advance (focus level when specimen height is aligned with the upper limit position of adjustment jig).  The same operation is practicable by the Focus Reset button.


Setting menu

(1)  Setting for Auto B/C Adjustment…
Displays the Auto B/C Adjustment setting window for presetting the conditions (brightness and contrast levels) for this adjustment.

(2)  Preset Magnification...
Displays the Setting for Preset Magnification window to specify two magnification values for preset magnification function.

(3)  Control Sensitivity...
Displays the Control Sensitivity setting window for adjusting the operational sensitivity of each operation button (for magnification, brightness, etc.).

(4)  Astigmatism Correction

  Yes
Displays the operation field for Astigmatism correction on the operation window.  This is used when astigmatism is noticeable on an image.

  No
Hides the operation field for Astigmatism correction from the operation window.

(5)  Observation Mode

  Standard Mode
Observe a standard specimen such as industrial material in this mode.  A comparatively high vacuum degree will be selected for the specimen chamber.

  Charge-up Reduction Mode
This mode should be selected when brightness changes or image is deviated in the standard observation mode.  A comparatively low vacuum degree will be selected for the specimen chamber.  When an image is observable (specimen chamber has been evacuated) in Charge-up Reduction Mode, an L mark appears in the information/comment area.

*  Observation mode cannot be changed during view mode is set to Freeze.


Maintenance menu

(1)  Beam Axis Alignment…
The Beam Axis Alignment window will appear for optical alignment of the electron beam.  This function is to be used after filament exchange.

(2)  Setting for Observation Screen Size…
The Setting for Observation Screen Size window will be displayed for registering the size of image observation area.  This operation must always be carried out after installation of the control application in PC.

[NOTE]:
Unless the observation screen size is properly registered, the scale-bar may not be displayed correctly.

(3) TMP running in mode
TMP(Turbo Molecular Pump) running in mode will be activated.  This is a mode done to make grease become familiar with the bearing in the TMP.  It takes about 30 minutes.

[CAUTION!]:
It is suggested to select TMP running in mode if the instrument has not been used for more than 1 month or TMP runs with abnormal noise.

* Do not turn off the main power switch while the TMP running-in mode is going on.

(4) Fit View Area
The observation screen is moved to the center of a display.  It is used after moving an observation screen.


Help menu

(1)  Topics Search... F1
Displays the help for this application in keyword search window.

(2)  Content...
Displays the help for this application in contents window.

(3)  Specimen Exchange...
Displays the help about the procedure for specimen exchange.

(4)  Filament Exchange...
Displays the help about the procedure for filament exchange.

(5)  Description of Buttons

  Show
Displays a description under each button for major operation and also activates ToolTips.

  Erase
Hide the description of each button on the operation window and inactivates ToolTips.

(6)  User Information…
Displays the User Information window to record the information of the user who manages this application. Use this feature when the manager of this program needs to be stored in memory for the purpose of management.

(7)  Version Information…
Displays the Version Information window in which the version of this application and the version information about the instrument is identified.


Start button

When “Start“ is displayed, electron beam is not irradiated (HV-OFF status).  Clicking the Start button will launch a process of turning on the electron gun power supply and heating the filament in order to irradiate a specimen with electron beam.  This process takes approximately 10 sec.  A dialog box appears to indicate that this process is underway.  Image observation is allowed after the dialog box has disappeared.  During image observation, the button is turned to “Stop“ in green.  After the process, view mode is automatically set to “Fast“.

When clicking the Start button immediately after startup of the application or specimen exchange, auto start ensues ( auto focus and auto B/C will be carried out automatically after heating the filament), and imaging magnification is automatically set to 100x.

[NOTE]:
If the button does not become active, refer to troubleshooting.  Also refer to troubleshooting if an instrument error message is reported or if the Start button does not turn into the Stop button.

The Start button remains inactive until vacuum in the specimen chamber has stabilized at an adequate level for image observation.  Usually this button becomes active in about 3 minutes after turning on the EXCHANGE switch following specimen exchange.


Stop button

During “Stop“ is displayed, electron beam is irradiated (HV-ON status).  Clicking the Stop button will turn off the electron gun power supply and stop heating the filament.  Then, the button is dimmed and its display changes to “Start“.

[NOTE]:
If the state in the specimen chamber or filament has become unsuitable for image observation, a message appears and button display changes from Stop to Start.  In these cases, refer to troubleshooting.


View Mode Selection buttons

View mode is changed by clicking either one of the buttons.  The button for the current view mode is lit in yellow. Select a view mode which suites to the operation.

(1)  Fast

Since scanning with this mode is fast in speed, this mode is suitable for finding target field of view where rapid display of observing image is required.

*  This button is ineffective when the current view mode is Fast.

(2)  Slow

Since scanning with this mode is slow in speed, this mode is suitable for checking an image to be saved where high resolution image is expected.

*  This button is ineffective when the current view mode is Slow.

(3)  Reduce

The field of image observation area will be restricted.  This view mode is suited for adjustment of image brightness and focus because the displayed image responses to the condition change swiftly.

* This button is ineffective when the current view mode is Reduce.

(4)  Freeze

In this view mode, the image under observation is kept paused.

*  This button is ineffective when the current view mode is Freeze.

[NOTE]:
In order to protect a specimen from beam damage, image observation will be suspended (HV will be turned off) and a message will be displayed if 5 minutes has passed with the electron beam irradiated (HV turned on) in the Freeze.


Quick Save button

An image will be saved as it appears on the observation area.
Image saving size: 640 x 480 pixels (image only), 640 x 520 pixels (image + information) and 640 x 550 pixels (image + information + comment)
Image type: JPEG file (*.jpg), Bitmap file (*.bmp), TIFF file (*tif)

By clicking the Quick Save button, quick saving starts and a dialog box which indicates the progress is displayed until the view mode changes to Freeze (image to be saved is defined).

*  Wait time varies with the view mode selected when clicking the “Quick Save“ button.  The dialog box will not appear if saving has started in the Freeze.

Once the image to be saved is defined, the dialog box disappears and the data saving window opens.  Specify the destination to save and a file name and select type of the image to save as, and click the [Save] button. Or click the [Cancel] button to cancel the save.

* Following characters (half-size) cannot be used for file names; [image].

An image file will be saved under the conditions preset on the Setting for Save window.

[NOTE]:
An image file will be saved under the conditions selected preliminarily on the Setting for Save window.  Therefore, it is recommended to check the settings before clicking Quick Save so that the saved image will always meet the aimed-at conditions.

After quick saving, view mode is set to Freeze.  Saved images can be checked in Windows Explorer.  By pressing the [F9] key on the keyboard, the folder where an image was saved in the last saving operation will be opened.


Save button

A high-resolution image will be saved.
Image saving size: 1280 x 960 pixels (image only), 1280 x 1040 pixels (image + information) and 1280 x 1100 pixels (image + information + comment)
Image type: JPEG file (*.jpg), Bitmap file (*.bmp), TIFF file (*tif)

When Save button is clicked, acquisition of a high-resolution image (image capture) starts irrespective of the current view mode.  During image capture, a dialog box is displayed. Wait for some time until view mode changed to Freeze. (it takes about 40 sec for determination of an image to be saved after capture.)

[NOTE]:
During image capture, pay attention not to give vibrations to the main unit.  Otherwise, noise may appear on the saved image.

Once the image to be saved is determined, the dialog box disappears and the data saving window opens.  Specify the destination to save and a file name and select type of the image to save as, and click the [Save] button. Or click the [Cancel] button to cancel the save.

* Following characters (half-size) cannot be used for file names; [image].

An image file will be saved under the conditions preset on the Setting for Save window.

[NOTE]:
An image file will be saved under the conditions selected preliminarily on the Setting for Save window.  Therefore, it is recommended to check the settings before clicking Quick Save so that the saved image will always meet the aimed-at conditions.

After standard saving, view mode is set to Freeze.  Saved images can be checked in Windows Explorer.  By pressing the [F9] key on the keyboard, the folder where an image was saved in the last saving operation will be opened.

*  After saving, quick saving will not be accepted.  To execute quick saving, change view mode from Freeze to any other.


Magnification button

Image magnification can be changed with this button. To set a higher magnification than the current level, click the + side, and the - side to set a lower magnification.  As a result, a magnification one step higher or lower than the current level is set and the image is redisplayed at the new magnification.  The current magnification is indicated at the center of this button.  When keeping the button pressed, magnification rises or falls continuously and quickly.

Magnification is selectable within 20x to 10,000x in 32 steps.  Magnification steps are as follows.

[NOTE]:
The low magnifications of 20x and 25x are settable only when the clearance between the topmost location of a specimen and the gauge is set at about 6 mm or more in height adjustment of the specimen holder.


Preset Magnification button

When you click a Preset button, the current magnification is changed to the one marked on the button.  Once these two Preset buttons are set at the values suitable for finding an observation point and saving an image, respectively, necessary magnifications can be selected just by clicking the Preset buttons.  Set preset magnifications on the preset magnification setting window.

[NOTE]:
The low magnifications of 20x and 25x are settable only when the clearance between the topmost location of a specimen and the gauge is set at about 6 mm or more in height adjustment of the specimen holder.  When a magnification of 20x or 25x is set for Preset and the above clearance is narrower than 6 mm, the Preset button becomes ineffective.


Brightness button

Brightness of the image observation area can be changed with this button.  To set a higher brightness level than the current adjustment, click the + side of this button, and the - side to set a lower brightness level.  When keeping the button pressed, brightness changes continuously and quickly.  The current brightness level is indicated by the indicator below the button.  When the green indicator bar extends longer, brightness level is higher (when the bar is shorter, brightness is lower).

[NOTE]:
Image brightness varies with specimen.  Even with the same adjustment, image brightness also varies with observation point and magnification.


Contrast button

Contrast of the image observation area can be changed with this button.  For setting a higher contrast level than in the current adjustment, click the + side of this button, and the - side for setting a lower contrast level.  When keeping the button pressed, contrast changes continuously and quickly.  The current contrast level is indicated by the indicator below the button.  When the green indicator bar extends longer, contrast level is higher (when the bar is shorter, contrast is lower).

[NOTE]:
Image contrast varies with specimen.  Even with the same adjustment, image contrast also varies with observation point and magnification.


Auto B/C button

Clicking the Auto B/C button starts auto brightness/contrast adjustment and image brightness and contrast of the image under observation are automatically adjusted.  Dialog box is displayed during this adjustment.  After completion of the adjustment, the dialog box disappears.  The results of the adjustment are reflected on brightness and contrast settings.

[NOTE]:
In the auto B/C adjustment setting window, set brightness and contrast levels as desired.

A change in magnification or specimen observation point may entail a deviation from proper brightness/contrast on an image displayed in the observation area. In this case, brightness/contrast can be adjusted quickly and easily by clicking the Auto B/C button.

[NOTE]:
A balance between brightness and contrast will be roughly adjusted.  For saving an image file, therefore, fine adjustment should be carried out by the Brightness and Contrast adjustment buttons as needed.


Focus Adjustment button

Focus (focal length) is adjustable in the direction of specimen height.  For reducing focal length from the current adjustment (because specimen height is higher), click the + side of this button, and the - side for increasing focal length (because specimen height is lower).  When keeping the button pressed, focal length changes continuously and quickly.  The current adjustment is indicated by the indicator at the center of the button.  When the green line of the indicator is higher, focal length is smaller (when the line is lower, focal length is larger).
In addition, image focus is finely adjustable by dragging the mouse within the image observation area.  Refer to Fine Focus Adjustment.

[NOTE]:
Focal length varies with the height of specimen holder set on the specimen stage.  When the specimen holder is higher, focal length is shorter, and it is longer when the holder is lower.  Check the specimen height using the adjustment jig.


Auto Focus button

Clicking the Auto Focus button starts auto focus and focus is automatically adjusted in the direction of specimen height.  During this process, a dialog box is displayed.  Upon completion of the process, the dialog box disappears, and the result of processing is reflected on focus setting.

[NOTE]:
For some specimens, auto focus may not work properly. In this case, focus should be adjusted manually.


Focus Reset button

Click this button, and focus condition will be reset to the preset reference focus level.

[NOTE]:
The focus level to be set here is based on the upper limit position of the adjustment jig.  For using the reset function, check the height of your specimen so that the clearance between the topmost point of specimen and the lower face of gauge becomes about 1 mm (within 0.5 to 1.5 mm).


Rotation button

Using this button, a displayed image can be rotated in the desired direction by rotating the scanning direction of electron beam.

(1)  Returning to 0
Click [image] mark of the Rotation button, and an image without rotation will appear.

(2)  Rotating 180 from the present rotational position
Click [image] mark, and an image after 180 rotation from the present rotational position will appear.

(3)  Rotating 90 clockwise from the present rotational position
Click [image] mark, and an image after clockwise 90 rotation from the present rotational position will appear.

(4)  Rotating 90 counterclockwise from the present rotational position
Click [image] mark, and an image after counterclockwise 90 rotation from the present rotational position will appear.

(5)  Finely adjusting rotational position
Clicking the + mark rotates an image clockwise and clicking the - mark rotates it counterclockwise.  Holding down the button rotates an image continuously and quickly.

[NOTE]:
At any angle other than 0 (reference position), operation of the specimen moving knobs does not match the image moving direction.

The current rotation angle is shown by the indicator at the center of this button. At rotation angle 0 (reference position), the indicator shows the top exactly.


Help button

Displays the Help window for this application.


Edit button

Clicking this button opens the Setting for Save window.  This window is used to edit the information and comment of information/comment area and that of a saved image (whether or not information/comment is embedded in an image file).  For details of setting, refer to the Setting for Save window.


Setting for Save window

You can choose the information items to be displayed, edit comment and select image type and file name for saving.

(1)  Screen Display tab
Allows editing of each information in the information/comment area and setting of display/non-display status.

  Information

i)  Date
By checking this box, date is displayed in the information/comment area, and the date of image recording will be entered in the saved image (except for image type “Image Only”).

ii)  Time
By checking this box, time is displayed in the information/comment area, and the time of image recording will be entered in the saved image (except for image type “Image Only”).

iii)  Image Number
By checking this box, image number is displayed in the information/comment area, and the image number will be entered in the saved image (except for image type “Image Only”).

* Image Number consists of a title and Auto Increment selection.  When the Auto Increment button is checked, a number will be displayed and it will increment whenever recording an image.  An initial number is settable within a range from 0000 to 9999.

[NOTE]:
Following characters (half-size) cannot be used for Image Number; [image].

iV)  Magnification
By checking this box, magnification is displayed in the information/comment area, and the magnification will be entered in the saved image (except for image type “Image Only”).

* In the information area, a magnification is displayed in the format of “xMMM“.  However, when magnification value is 1000 or larger, it is displayed in “xM.Mk“, and in “xMMk“ when it is 10000 or larger.

  Comment input

By checking this box, comment is displayed in the information/comment area, and the comment will be entered in the saved image (except for image type “Image Only”).

(2)  Save Image tab
Information display type is settable for a saved image through selection in Image Type.

  Image Type
In this section, you can choose an image type (whether or not information/comment is embedded in a saved image).

Image Type and Image Saving Size

Shown below are example image of the information/comment area and that of the image to be saved for each image type.

i)  Image only

  Information/comment area
Character display in the information area and comment area is dimmed.

  Saved image
Only an image without any information is saved as an image file. (Image saving size: 1280 x 1024 pixels in standard saving, 640 x 480 pixels in quick saving)

ii)  Image + Information

  Information/comment area
Character display is lit in the information area and dimmed in the comment area.

  Saved image
A saved image contains information items which are selected in “Screen Display” tab under observed image. (Image saving size:  1280 x 1040 pixels in standard saving, 640 x 520 pixels in quick saving)

iii)  Image + Information + Comment

  Information/comment area
Character display is lit in both the information area and comment area.

  Saved image
A saved image contains information items which are selected in “Screen Display” tab and comments under observed image. (Image saving size: 1280 x 1100 pixels in standard saving, 640 x 550 pixels in quick saving)

[Note]:
A magnification value to be embedded in a saved image is based on the image display in the image observation area.  It may differ from the actual imaging magnification.
When the observation mode mark “L“ is displayed in the information area, the mark will be also embedded in a saved image.

  File Name
Image number and observation magnification can be used for a file name.

i)  Use Image Number
The image number displayed in the information/comment area will be used as a file name.  When checkmark is not placed or image number is not displayed in the information area, Image will be used as a file name.

ii)  Use Magnification
A magnification value will be added to the file name.  Upon execution of quick or standard saving, “file name“ + “(xMMM)“ is displayed for File name on the data saving window.  And upon execution of saving via Digital Zoom, “file name“ + “(D xMMM)“ is displayed for File name on the data saving window.  However, when magnification value is 1000 or more, “xM.Mk“ is used, and “xMMk“ is used when it is 10000 or more.

* The file name for an image to be saved can also be edited and specified on the data saving window.


Auto B/C Adjustment window

Brightness and contrast levels in Auto B/C can be set.  Select Auto B/C Adjustment from the Setting menu to open this window.  Enter desired values for Brightness and Contrast Levels.

  Brightness Level
A brightness level (within -2 to +2) in execution of auto B/C is adjustable.  Change the level using the slider. When you raise the level, an image will become brighter after auto B/C adjustment.  Conversely, when you lower the level, an image will become darker.

  Contrast Level
A contrast level (within -2 to +2) in execution of auto B/C is adjustable.  Change the level using the slider.  When you raise the level, image contrast will become stronger after auto B/C adjustment.  Conversely, when you lower the level, image contrast will become weaker.


Setting for Preset Magnification window

A desired magnification can be registered independently for each of Magnifications 1 and 2.  Select Setting for Preset Magnification from the Setting menu to open the Setting for Preset Magnification window.  Using the slider or up/down button on this window, set the respective preset magnification values.  These values are applied by clicking the [SET] button or [OK] button.  The result of your registration is reflected on the magnification values on the Preset buttons on the operation window.


Control Sensitivity window

Sensitivity of each operation button (magnification, brightness, etc.) is adjustable.  Select Control Sensitivity from the Setting menu to open this window opens.  Set the sensitivity (response) of each button at the desired level.  Every button allows level setting in 3 steps (-1: slow, 0: standard, +1: fast).

(1)  Magnification
Sets the operational sensitivity (speed of continuous magnification change) of the Magnification button when the button is kept pressed.

(2)  Brightness
Sets the operational sensitivity (speed of continuous brightness change) of the Brightness button when the button is kept pressed.

(3)  Contrast
Sets the operational sensitivity (speed of continuous contrast change) of the Contrast button when the button is kept pressed.

(4)  Focus
Sets the operational sensitivity (speed of continuous focus change) of the Focus button when the button is kept pressed.

(5)  Astigmatism
Sets the operational sensitivity (speed of continuous astigmatism change) of the scroll bar in the Astigmatism operation field when the arrow is kept pressed.

(6)  Rotation
Sets the operational sensitivity (speed of continuous change) of the Rotation button (fine adjustment button) when the button is kept pressed.


Digital Zoom Window

An image under observation can be digitally zoomed in.

(1)  Digital Zooming Functions

i)  Zooming magnification
From the drop down menu, select a digital zooming magnification (x2 or x4).

ii)  Zooming area specifying frame
Enclose a digital zooming area with this frame, which can be moved within the image displayed on the Digital Zoom window by mouse dragging.

*  Frame size varies with zooming magnification.

iii)  Zoom button
This button executes digital zoom. It does not function when an image is already zoomed.

iv)  Return button
This button returns a digital zoomed image to x1 display. It functions when an image is zoomed.

v)  Save button
An image displayed on the Digital Zoom window can be quickly saved as it appears on the window (image saving size: 640 x 480 pixels).

vi)  Close button
Closes the Digital Zoom window.

(2)  Digital Zooming Operation

i)  When selecting Digital Zoom from the Edit menu, acquisition of a high-resolution image (image capture) starts irrespective of current view mode.  During image capture, a dialog box is displayed, and in approximately 30 to 40 seconds, the image capture will be completed and view mode is set to Freeze.

[NOTE]:
Caution: During image capture, pay attention not to give vibrations to the main unit.  Otherwise, noise may appear on the saved image.

ii)  When image capture is completed, the dialog box disappears and the Digital Zoom window opens.

iii)  Specify a zooming magnification and zooming area, and click the [Zoom] button.  A digitally zoomed image is then displayed.

iv)  The digital zoom image can be saved by clicking the [Save] button. After the data saving window appears, input the destination to save and a file name, select type of the image, and click the [Save] button. If you want to cancel saving, click the [Cancel] button. [Image saving size: 640 x 480 pixels (image only), 640 x 520 pixels (image + information) and 640 x 550 pixels (image + information + comment)]

*  Following characters (half-size) cannot be used for file names; [image].

v)  The image file will be saved with the conditions preset on the Setting for Save window.  When a magnification value is displayed in the information area, the value will also be embedded in the saved image. The magnification display to be embedded corresponds to a virtual magnification “D xMMM“ at the time of digital zooming. However, when magnification value is 1000 or more, “xM.Mk“ is used, and “xMMk“ is used when it is 10000 or more.

vi)  After digital zooming, view mode is set to Freeze.  Saved images can be checked in Windows Explorer.  By pressing the [F9] key on the keyboard, the folder where an image was saved in the last saving operation will be opened.

*  Immediately after digital zooming, quick saving is not allowed. To do quick saving, view mode must be changed to any other than Freeze.


Data Saving window

The destination to save and a file name is specified.

i)  Save in
Clicking on the drop down menu will display a list of drives and folders.  Select a drive and folder to save.  Details of the selected saving location (a list of files and folders) will be displayed.  To create a new folder, click the [image] button.

ii)  File name
In the [File name] box, enter a file name of the image to be saved.

*  Following characters (half-size) cannot be used for file names; [image].

[NOTE]:
In case “Use Image Number“ is selected in File Name in Save Image setting, an image number will be displayed for File name.  And if “Use Magnification“ is selected, a magnification value will be added to a file name.

iii)  Save as type
The image file can be chosen from the below three types.

iV)  Save button
Initiates the saving operation.

v)  Cancel button
Cancels the current saving operation.

[NOTE]:
With an image file, text file which contains observation information is also saved.  Its file name is same as that of the image file and its file extension is *.txt.


Beam Axis Alignment window

This window is used for beam axis alignment after consumable replacement.  Select Beam Axis Alignment from the Maintenance menu to open the Beam Axis Alignment window.  By following the guidance, you can carry out beam axis alignment easily.  Before beam axis alignment, make sure that specimen specialized for the image check is attached to the specimen stage.  For details, refer to the method of beam axis alignment.

[NOTE]:
The Beam Axis Alignment window is displayed only during HV-ON status.  Beam axis alignment will stop if the electron gun becomes abnormal during the alignment.

i)  Operation step buttons
Accelerating voltage and filament current will be set in response to each step of beam axis alignment. Also, the current operation step is indicated.

* Upon start of the Beam Axis Alignment window, [STEP1] is selected.

  [STEP 1] button
Clicking this button starts the Step 1 of beam axis alignment.

  [STEP 2] button
Clicking this button starts the Step 2 of beam axis alignment.

  [STEP 3] button
Clicking this button starts the Step 3 of beam axis alignment.

  [STEP 4] button
Clicking this button starts the Step 4 of beam axis alignment.

  [STEP 5] button
Clicking this button starts the Step 5 of beam axis alignment.

  [END] button
Clicking this button stops and closes the beam axis alignment.

ii)  Axis Alignment
The procedure for axial alignment of the electron gun is shown with animation.

iii)  Reference Image
A reference image (aimed-at image) after axial alignment at each step is displayed here.

iv)  Operation description
Operation procedure and tips for adjustment of beam axis alignment at each step are shown.

v)  Stop button
Stops beam axis alignment and closes the Beam Axis Alignment window.


Setting-up the Observation Screen Size window

This window is used for registering the size of the image observation area of your PC. Whenever installing the control application in PC, observation screen size must be set. Select Setting for Observation Screen Size from the Maintenance menu to open this window.

[NOTE]:
If the observation screen size is not registered properly, the scale may not be displayed correctly.

Measure the image observation area with a ruler or the like and enter the measured size for Screen Size. Click the [Set] or [OK] button to register the entered screen size.


Astigmatism Correction

Astigmatism of an image under observation (distortion of electron beam) can be corrected here.  Adjustment is required after filament exchange.  Select Astigmatism Correction from the Setting menu, and the astigmatism correction field will appear over the information/comment area on the operation window.

[NOTE]:
Only with the HV-ON status, astigmatism can be corrected.

i)  Astigmatism 1 scroll bar
For collection of horizontal aberration.

ii)  Astigmatism 2 scroll bar
For collection of vertical aberration.

iii)  Reset button
Resets astigmatism to the factory-set level.

iv)  Close button
Hide the astigmatism correction field from the operation window and displays the information/comment area.


Fine Focus

The image focus can be finely adjusted by dragging with the left mouse button held down within the image observation area. Optimize image focus while observing the image. When fine focus adjustment is allowed in this area, the mouse pointer turns into “FOCUS“ mark.

*  this adjustment is not allowed when the view mode is set to Feezed or when Start is displayed at the start button ( HV-OFF status ).


Checking Saved Images

Display a list of saved images using Windows(R) Explorer.

(1)  Press the [F9] key on the keyboard.

(2)  The folder where an image was saved in the last saving operation will be opened.

[NOTE]:
When saved images are represented by icons in the folder, select “Filmstrip“ or “Thumbnails“ from the View menu of the folder. Saved images will be listed in the folder.

(3)  Double-click the thumbnail you want to check, then the image will open with Windows(R) Picture and Fax Viewer.


User Information Window

The information of the user who manages this application can be recorded.  Use this feature when the manager of this program needs to be stored in memory for the purpose of management.  The contents entered on the User Information window can be checked on the Version Information window.  Select User Information from the Help menu to open the user information setting window.

(1)  Administrator Information

i)  Manager
Enter the name of manager of this instrument.

ii)  Company/Department
Enter the department managing this instrument.

(2)  Memo
Instrument information or any other information can be entered here.


Version Information Window

This window indicates product logo, software version (PC: application program, FIRM: microcomputer program, UNIT: CPU version) and copyright.  Also in the lower field, the contents registered in the User Information window are displayed.  Select Version Information from the Help menu to open the version information setting window.


Minimize button

Minimizes the window of this application program. The minimized program is stored under the name of [Hitachi TM-1000] on the taskbar.

Click [Hitachi TM-1000] on the taskbar, and the application program appears in normal size.


Close button

Terminates this application program.  When clicking the Close button, a message box confirming termination of the application is displayed.

Click the [OK] button on this message box to close the application, or click the [Cancel] button to cancel closing.


Data Entry & Measurement Window

Texts and graphics can be added up to 50 items on an observed image.  And the distance between two points on the image can be measured. (Measurement function)

(1)  Data Entry Functions

a) Text/graphics entry mode selection buttons

 Stop data entry
Stops data entry.  No texts or graphics are added.

 Text mode
To add text on the image, click this button.  Then, click on the place where you want to add the text.  The text input area will appear on the image as a black bar. Input the text using keyboard and click the Enter key to fix them.  Text input area can be moved by clicking any place on the image as long as the text is under edit.

 Line
Click the button to add lines.  On the observed image, press the left button of the mouse to draw the starting point of the line and drag the mouse to the position where you want to end the line and then release the button.

 Arrow
Click the button to add single-head arrows on the image.  Click and drag the mouse to draw an arrow.

 Double-headed arrow
Click the button to add double-head arrows on the image.  Click and drag the mouse to draw a double-headed arrow.

 Inner dimension mark
Click the button to add inner dimension marks on the image.  Click and drag the mouse to draw an inner dimension mark.

 Outer dimension mark
Click the button to add outer dimension marks on the image.  Click and drag the mouse to draw an outer dimension mark.

 Inner dimension mark with (Measurement function)
Click the button to add inner dimension marks on the image.  Click and drag the mouse to draw an inner dimension mark, and then distance between the starting point and end point will be measured and the value will be displayed.

 Outer dimension mark with (Measurement function)
Click the button to add outer dimension marks on the image.  Click and drag the mouse to draw an outer dimension mark, and then distance between the starting point and end point will be measured and the value will be displayed.

 Circle
Click the button to add circles or oval shapes on the image.  On the image, press the left button of the mouse at the point where you want to start drawing and drag the mouse to draw the shape.  Release the mouse button to fix the circle.

 Rectangle
Click the button to add rectangles on the image.  On the image, press the left button of the mouse at the point where you want to start drawing and drag the mouse to draw the shape.  Release the mouse button to fix the rectangle.

b) Shadow (check box)
Checking this box will add black borders to all characters and graphics.

c) Selection buttons
[<] or [>] button selects graphics or text on the image in order of input.  Selected graphics and texts are indicated with red color.  [All] button selects all graphics and texts on the image.

d) Clear button
Clears selected graphics or texts.

e) [image]  (Image Balance) button
The Image Balance window is displayed.  Brightness and contrast can be adjusted on this window.  Refer to the Image Balance window for more details.

f) Save button
Clicking this button saves the image with added items. [Image saving size: 640 x 480 pixels (image only), 640 x 520 pixels (image + information) and 640 x 550 pixels (image + information + comment)]

g) Close button
Closes the Data entry & Measurement window.

(2)  Data Entry Operation

i) Click ”Freeze” button to pause the image under observation.  Select Data Entry/Measurement from the Edit menu.

* Just after Quick Save or Standard Save, the data entry operation can be selected.  When, however, view mode is set to Fast, Slow, or Reduce, the data entry command becomes inactive.

ii) Data entry & Measurement Window is displayed.

iii) Select a mode (graphics or text) from entry mode selection buttons.  Add texts and figures you want to save with the image.

[NOTE]:

The texts or graphics cannot be reedited once they were added on the image.  To change texts or graphics, delete the item and add a new one.
When the specimen setting height varies, resulted value of measurement may vary due to the focal point variation, even though the same specimen is measured with the identical magnification.  the measured values may vary between the center and the periphery of the image.

iv) To delete texts or graphics, select them with the selection button and click the Clear button.

* Deleted items cannot be recovered.

v) To save the image and added items, click the [Save] button.  The data saving window will appear.  On that window, select the destination folder to save and a file name, select type of the image, and click the [Save] button.  To cancel the saving operation, click the [Cancel] button.

* Following characters cannot be used for file names;

The image file will be saved with the conditions preset on the Setting for Save window.

[NOTE]:
An image file will be saved under the conditions selected preliminarily on the Setting for Save window.  Therefore, it is recommended to check the settings before starting the data entry & measurement so that the saved image will always meet the aimed-at conditions.

vi) Saved images can be checked in Windows Explorer(R).  By pressing the [F9] key on the keyboard, the folder where an image was saved in the last saving operation will be opened.


Image Balance Window

Image adjustment of the Data Entry & Measurement window can be performed.

(1) Brightness
Brightness is adjusted.  If the slider drags to the right, it will become bright, and if this slider drags to the left, it will become dark.

(2) Contrast
Contrast is adjusted.  If the slider drags to the right, it will become higher contrast, and if it drags to the left, it will become lower contrast.

(3) Auto B/C button
Click this button to adjust automatically the brightness and contrast levels of an image.

(4) OK button
Close the Image Balance window, and update image for the Data Entry & Measurement window.

(5) Cancel button
Close the Image Balance window.


Message List

  1000 ( ErrCode : 1000 )
Failed to access the memory.  Could not start up the application.
If an access error occurs on the hard disk, this message is displayed.  Make sure PC is normal and the application file has been installed properly.

  1001 ( ErrCode : 1001 )
Memory size is inadequate.  Could not start up the application.
If free area in the hard disk is less than 100 MB, this message will be displayed.  Increase the free area to 100 MB or more by deleting unnecessary files.

  1002 ( ErrCode : 1002 )
No System File found.  Could not start up the application.
Some of the files required for running this program appear to be lacking.  Uninstall the program, and then reinstall it.  For uninstalling and reinstalling of the program, refer to 2.6 and 2.5.1 to 2.5.7 in the instruction manual, respectively.

  1003 ( ErrCode : 1003 )
No System File found.  Could not start up the application.
Some of the files required for running this program appear to be lacking.  Uninstall the program, and then reinstall it.  For uninstalling and reinstalling of the program, refer to 2.6 and 2.5.1 to 2.5.7 in the instruction manual, respectively.

  1004 ( ErrCode : 1004 )
No USB driver found.  Could not start up the application.
Some of the files required for running this program appear to be lacking.  Install the USB driver.  For installation of the USB driver, refer to 2.5.4 to 2.5.5 in the instruction manual.

  1050 ( ErrCode : 1050 )
Could not start up the application.  Please check "Display Setting".
This message appears when “display resolution” is not set at 1024 x 768 pixels or more and “display color” is set below 16-bit color level.  Change display setting.  For display setting, refer to 2.5.6.

  1080 ( ErrCode : 1080 )
Failed to access Initial File.  Could not start up the application.
Access to this program is not authorized.  Log on to the computer at an authorization level of Administrator and start the program.

  1081 ( ErrCode : 1081 )
No application files found, or failed to access these files.  Could not start up the application.
If application files access error occurs, this message is displayed.  When the account type into computer is Limited user, switch to the other account as Computer Administrator again.  Set the observation window size referring to 2.5.7 in the instruction manual.  Then it is possible to start this application for Limited user.

  1100 ( ErrCode : 1100 )
No Adjustment File found.  Cannot start up the application.
Adjustment file “TM_Adjust.ini” cannot be found.  Copy the adjustment file.  For adjustment file copying, refer to 2.5.3 in the instruction manual.

  1101 ( ErrCode : 1101 )
Cannot start up the application.  Please check Adjustment File.
Adjustment file “TM_Adjust.ini” contains no data or inadequate data.  Copy the adjustment file.  For adjustment file copying, refer to 2.5.3 in the instruction manual.

  1110 ( Code : 1110 )
No Initial File found.  Do you default to start up PC?
Initial file cannot be found.  For starting this application in default setting, click the [OK] button, and the [Cancel] button for terminating this application.  After start of the application, set observation window size (referring to 2.5.7 in instruction manual).

  1111 ( Code : 1111 )
No data found in Initial File.  Do you default to start up PC?
Initial file contains no data or inadequate data.  For starting this application in default setting, click the [OK] button, and the [Cancel] button for terminating this application.  After start of the application, set observation window size (referring to 2.5.7 in instruction manual).

  1112 ( Code : 1112 )
The data in Initial File were wrong.  Do you default to start up PC?
Initial file contains abnormal or inadequate data.  For starting this application in default setting, click the [OK] button, and the [Cancel] button for terminating this application.  After start of the application, set observation window size (referring to 2.5.7 in instruction manual).

  1113 ( Code : 1113 )
Can not start up the application.  Failed to access Initial File.
If this application could not be started in default setting, this message is displayed.  When the account type into computer is Limited user, switch to the other account as Computer Administrator again.  Set the observation window size referring to 2.5.7 in the instruction manual.  Then it is possible to start this application for Limited user.

  1115 ( Code : 1115 )
Set up the observation screen size when the application has started.
Set the observation window size.  For details, refer to 2.5.7 in the instruction manual.

  1120 ( Code : 1120 )
No User Setting File found.  Do you default to start up PC?
User setting file cannot be found.  For starting this application in default setting, click the [OK] button, and the [Cancel] button for terminating this application.

  1121 ( Code : 1121 )
No data found in User Setting File.  Do you default to start up PC?
User setting file contains no data or inadequate data.  For starting this application in default setting, click the [OK] button, and the [Cancel] button for terminating this application.

  1122 ( Code : 1122 )
The data in User Setting File are wrong.  Do you default to start up PC?
User setting file contains abnormal data or inadequate data.  For starting this application in default setting, click the [OK] button, and the [Cancel] button for terminating this application.

  1140 ( ErrCode : 1140 )
Can not start up the application.Please confirm if PC is supporting USB2.0.
PC may support only USB1.0/USB1.1.  A PC which supports USB2.0 is required for this instrument.

  1150 ( ErrCode : 1150 )
Time has run out.  Once shut off Main Power Switch, and start up again.
Time-out occurred during start processing.  Make sure the USB cable is not disconnected and the main power supply is turned on.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
If the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1160 ( ErrCode : 1160 )
Main Power Switch is off, or the cable is not connected.
It can be thought that the TM-1000 main unit is de-energized or the USB cable is disconnected.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC and the application.
If the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1200 (Code : 1200)
Now turning on accelerating voltage.  Please wait.
This message appears during a gradual-increase process of electron beam.  While the message is displayed, no operations are allowed on the image observation window.  For stopping the gradual-increase process, click the [Cancel] button.

  1201 ( ErrCode : 1201 )
Time has run out.  Could not turn on accelerating voltage.
This message appears when time-out has been detected during a gradual-increase process of electron beam.  This process will be stopped.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
If the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1209 ( ErrCode : 1209 )
Electron Gun or Power Supply for Electron Beam is wrong.  Electron beam turned off.
Abnormality on the electron gun or the power supply for electron beam has been detected.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
If the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1210 ( ErrCode : 1210 )
Power Supply for Electron Beam is wrong.  Once turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
Abnormality on the power supply for electron beam has been detected.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
If the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1211 ( ErrCode : 1211 )
Electron Gun is wrong.  Once Turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
An emission current of 3 uA or more has been detected at a filament current of 0.0 A.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
If the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1212 ( Code : 1212 )
Beam current is too high.  Please check the filament setting.
An emission current of 150 uA or more (overcurrent) has been detected during a gradual-increase process of electron beam.  Make sure there are no particles on the filament tip and Wehnelt opening.  Also confirm that the specified spacer ring is set.  For details, refer to “filament exchange” in 5.3.2 of the instruction manual.

  1213 ( Code : 1213 )
Beam current is too low.  Please check the filament setting.
An emission current level lower than 20 uA has been detected during a gradual-increase process of electron beam.  The filament may have burned out.  Renew the filament.  For details, refer to “filament exchange” in 5.3.2 of the instruction manual.

  1214 ( Code : 1214 )
The filament has burned out. Or, it is not set right.  Please check the filament setting.
An emission current level lower than 3 uA has been detected during a gradual-increase process of electron beam.  Make sure there are no particles on the filament tip and Wehnelt opening.  Also, the filament may have burned out.  Replace the filament with a new one.  For details, refer to “filament exchange” in 5.3.2 of the instruction manual.

  1222 ( Code : 1222 )
Beam current is too high.  Please check the filament setting.
An emission current of 150 uA or more (overcurrent) has been detected emitting electron beam.  Make sure there are no particles on the filament tip and Wehnelt opening.  Also confirm that the specified spacer ring is set.  For details, refer to “filament exchange” in 5.3.2 of the instruction manual.

  1223 ( Code : 1223 )
Beam current is too low.  Please check the filament setting.
An emission current level lower than 20 uA has been detected emitting electron beam.  The filament may have burned out.  Renew the filament.  For details, refer to “filament exchange” in 5.3.2 of the instruction manual.

  1224 ( Code : 1224 )
The filament has burned out. Or, it is not set right.  Please check the filament setting.
An emission current level lower than 3 uA has been detected emitting electron beam.  Make sure there are no particles on the filament tip and Wehnelt opening.  Also, the filament may have burned out.  Replace the filament with a new one.  For details, refer to “filament exchange” in 5.3.2 of the instruction manual.

  1230 ( Code : 1230 )
"Auto start" is activated.  Please wait.
This message appears during auto start (gradual increase of electron beam/auto focus/auto contrast adjustment).  While this message is displayed, no operations are allowed on the observation window.  For stopping auto start, click the [Cancel] button.

  1231 ( ErrCode : 1231 )
Time has run out.  Failed "Auto Start".
This message appears when time-out has been detected during auto start.  Auto start will stop.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
If the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1240 ( Code : 1240 )
Now changing the setting for electron beam. Please wait.
This message is displayed under setting of beam axis alignment conditions.  While this message is displayed, no operations are allowed on the beam axis alignment window.  Upon completion of the condition setting, the message disappears.

  1241 ( ErrCode : 1241 )
Time has run out.  Failed "Condition Setting".
If time-out is detected during setting of beam axis alignment conditions, this message appears.  Then, beam axis alignment stops.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
If the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1242 ( Code : 1242 )
Was the reference sample set in the center of the stage ?
This message is reported to confirm that the furnished image check specimen is set at the center of specimen stage before start of beam axis alignment.  If the specimen is already set, click the [OK] button.  Beam axis alignment starts.  If the specimen is not yet set, click the [Cancel] button.

  1243 (Code:1243)
After setting the reference sample in the center of the stage, make Beam Axis Alignment again.
This message appears in response to selection of “Cancel” for message 1242.  After setting the furnished image check specimen on the specimen stage, retry beam axis alignment.

  1245 ( Code : 1245 )
Now warming up Electron Gun as it is humid.  Please wait.(It takes about 3 minutes.)
Filament current leak has been detected during gradual-increase process of electron beam.  This may be attributed to a high humidity around the electron gun.  Warming-up of the electron gun will be carried out.  Wait for some time.  After completion of warming-up, resume image observation.  If this message appears repeatedly, contact the nearest service representative.

  1246 ( Code : 1246 )
Electron gun has been warmed up.  Electron beam can be turned on.
When the electron gun has been warmed up normally, this message appears.  After the message disappears, image observation can be started.

  1250 ( Code : 1250 )
Electron beam has been turned off.  Now ventilating the specimen chamber.
The EXCHANGE switch was pressed during turning on the electron gun power supply and heating the filament.  Because the inside of specimen chamber has been set in the evacuation status, electron beam was turned off.  Until the inside of specimen chamber reaches a high vacuum (green LED (READY) lights up to indicate image observable status), image observation cannot be started.

  1251 ( Code : 1251 )
Electron beam has been turned off.  Now ventilating the specimen chamber.
The EXCHANGE switch was pressed during electron beam irradiation (HV-ON status).  Because the inside of specimen chamber has been set in the evacuation status, electron beam was turned off.  Until the inside of specimen chamber reaches a high vacuum (green LED (READY) lights up to indicate image observable status), image observation cannot be started.

  1255 ( Code : 1255 )
Electron beam turned off as 5 minutes had past under PAUSE condition.
During electron beam irradiation (HV-ON status), 5 minutes have passed in the still image display mode.  Because the specimen must be protected from beam damage, the electron beam was turned off.  After this message disappears, image observation can be started.

  1265 ( Code :1265 )
Electron beam is on.  Do you shut down the application ?
During electron beam irradiation (HV-ON status), shutdown of the application was selected.  Confirm the shutdown here.  When clicking the [OK] button, the electron beam turns off and shutdown procedure starts.  And when clicking the [Cancel] button, the shutdown is canceled.

  1300 ( Code :1300 )
"Auto B/C Adjustment" is activated.  Please wait.
During auto contrast adjustment, this message is reported.  While the message is displayed, no operations are allowed on the image observation window.  Upon completion of auto contrast adjustment, the message disappears.

  1301 ( ErrCode : 1301 )
Time has run out.  Failed "Auto B/C Adjustment".
If time-out is detected during auto contrast adjustment, this message appears.  Auto contrast adjustment stops, and brightness and contrast are reset to the levels before this adjustment.  If this message appears repeatedly, contact the nearest service representative.  And if auto contrast adjustment remains unsuccessful, brightness and contrast should be adjusted manually.

  1310 ( Code : 1310 )
"Auto Focus" is activated.  Please wait.
This message is displayed during auto focus.  While the message is displayed, no operations are allowed on the image observation window.  Upon completion of auto focus, the message disappears.

  1311 ( ErrCode : 1311 )
Time has run out.  Failed "Auto Focus".
If time-out is detected during auto focus, this message appears.  Auto focus stops, and focus condition is reset to the level before auto focus.  If this message appears repeatedly, contact the nearest service representative.  And if auto focus remains unsuccessful, manual focus adjustment is required.

  1390 ( Code : 1390 )
The focus is out of its range.  Adjust the specimen height properly.
This message appears when the following condition lasts for 2 minutes; electron beam is projected (HV-ON status) and focus position is not proper because the specimen holder position is low.  It is recommended to stop image observation once and readjust the height of specimen holder properly.  For details, refer to “specimen preparation and height adjustment” in 4.2.2 of the instruction manual.

  1395 ( Code : 1395 )
The focus is out of its range.  The magnification accuracy may exceed 10%.  Do you continue ?
This confirmation message appears since magnification error will increase if focus position is not proper for execution of quick save, standard save and digital zoom.  Clicking the [OK] button selects continuation of the current process, and clicking the [Cancel] button selects its stop.  It is recommended to stop image observation once and readjust the height of specimen holder properly.  For details, refer to “specimen preparation and height adjustment” in 4.2.2 of the instruction manual.

  1400 ( Code : 1400 )
Now capturing the image.  Please wait.

This message reports execution of image capturing for saving or digital zooming.  While the message is displayed, no operations are allowed on the image observation window.  Upon completion of image capturing, the message disappears.

  1401 ( ErrCode : 1401 )
Time has run out.  Failed "Image Capture".
If time-out is detected during image capturing, this message appears.  Image capturing stops and the display mode returns to the one before image capturing.  If the message appears repeatedly, contact the nearest service representative.

  1410 ( ErrCode : 1410 )
"PAUSE" is activated.  Please wait.
This message appears during still image execution for quick saving.  While the message is displayed, no operations are allowed on the image observation window.  Upon return to the still image display mode, the message disappears.

  1411 ( ErrCode : 1411 )
Time has run out. Failed "PAUSE".
If time-out is detected during quick saving, this message appears.  Quick saving stops and the display mode returns to the one before quick saving.  If the message appears repeatedly, contact the nearest service representative.

  1420 ( ErrCode : 1420 )
Something wrong in Disk. Failed to save the image.
Access to the hard disk or data saving medium failed in image data saving.  Image could not be saved normally.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
If the same message appears repeatedly after restart, contact the nearest service representative.

  1421 ( Code : 1421 )
Memory size is inadequate.  Failed to save the image.
During image data saving, it was detected that a free area in the hard disk or data saving medium is not adequate.  Image could not be saved normally.  Secure an adequate free area in the hard disk or data saving medium.

  1422 ( Code : 1422 )
The same File Name has been found.  Do you replace it by a new file ?
The same file name has already been contained at the destination of saving.  When clicking the [OK] button, data will be overlaid.  When clicking the [Cancel] button, the data saving window reappears.

  1423 ( Code : 1423 )
Memory size is inadequate.  Change the destination of an image to save.
During image data saving, it was detected that a free area in the hard disk or data saving medium is not adequate.  Image could not be saved normally.  Secure an adequate free area in the hard disk or data saving medium.

  1425 ( Code : 1425 )
File Name is not valid.  Use a different File Name.
The following characters such as \, /, :, ;, *, ?, ", <, >, |, !, ', or & cannot be used for file names.  Clicking the [OK] button displays the data saving window again.

  1430 ( Code : 1430 )
The image can not be saved directly from a shared network folder.  Assigning a drive letter to the connection is required to save the image using My Computer.
This message appears if you attempt to save an image directly from My Network.  Clicking the [OK] button displays the data saving window again.  No image can be saved directly from My Network.  For image saving, assign a network drive on My Computer and specify the network drive on the data saving window.

  1450 ( ErrCode : 1450 )
Failed to save the image.
Image saving failed because any error occurred during image saving.  Make sure the saving destination allows your access and it is not write-protected (not a read-only memory).  If the same error recurs, contact the nearest service representative.

  1470 ( Code : 1470 )
Added items exceed the maximum number of the items that can be added on an image.  No more items can be added.
This message will be displayed when the number of data items exceeds 50.  To add new items, delete unnecessary items first.

  1471 ( Code : 1471 )
Proceeding with this operation will delete all the items.  Do you want to delete?
Message will be displayed to confirm the operation.  Clicking [OK] will delete all items, and clicking [Cancel] will cancel the operation.

  1500 ( ErrCode : 1500 )
Can not evacuate.  Check if the stage is closed right.  Check if the diaphragm pump is working.  Once turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
Make sure the specimen stage and electron gun are closed securely.  Press the EXCHANGE switch while holding the specimen stage and electron gun.  Also confirm that the vacuum pipe of diaphragm pump is not bent.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
if the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1501 ( ErrCode : 1501 )
The rotation speed of TMP does not reach the normal level.  Check if there is no vacuum leakage.  Once turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
Make sure the specimen stage and electron gun are closed securely.  Press the EXCHANGE switch while holding the specimen stage and electron gun.  Also confirm that the vacuum pipe of diaphragm pump is not bent.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
if the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1502 ( ErrCode : 1502 )
The vacuum does not reach the normal level.  Check if there is no vacuum leakage.  Once turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
Make sure the specimen stage and electron gun are closed securely.  Press the EXCHANGE switch while holding the specimen stage and electron gun.  Also confirm that the vacuum pipe of diaphragm pump is not bent.  Turn off the power supply switch of control unit and restart the PC.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
if the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1503 ( ErrCode : 1503 )
TMP stopped due to the exceeded temperature or current.  Check if the diaphragm pump is working right and there is no vacuum leakage.  Once turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
Turn off each power supply switch of the PC and control unit, and cool the instrument naturally for about 1 hour.  Make the following confirmations in i to iv.
i)  Make sure the room temperature is 35 or lower.
ii)  Make sure the vacuum pipes are not bent.
iii)  Make sure dust has not stuck to the O-ring contacting face of specimen stage.
iv)  Make sure dust has not stuck to the O-ring contacting face of electron gun.
After cooling the instrument for about 1 hour, turn on the power supply switch of control unit.  Press the EXCHANGE switch for ventilating the specimen chamber.  Then, press the EXCHANGE switch while holding the specimen stage and electron gun in order to evacuate the specimen chamber.  Make sure the diaphragm pump emits an operating sound shortly after evacuation.  And if the same message appears repeatedly, contact the nearest service representative.

  1520 ( ErrCode : 1520 )
The cooling fan in Main Unit stopped.  Once turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
Make sure the fuse has not blown.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
if the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1521 ( ErrCode : 1521 )
The cooling fan in Control Unit stopped.  Once turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
Make sure the fuse has not blown.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
if the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1530 ( ErrCode : 1530 )
Evacuation System is wrong.  Once turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
Abnormality on the evacuation system was detected.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
if the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1540 ( ErrCode : 1540 )
The vacuum gauge system is wrong.  Once turn off the Main Power Switch,and try again.  Please call our service agent if the problem is not solved.
The vacuum gauge (Pirani gage) may have been burned out.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
if the same message appears repeatedly after restarting the system, contact the nearest service representative.

  1550 ( Code : 1550 )
Now evacuating the specimen chamber.  Please wait.
This message is displayed when the specimen chamber is under evacuation after pressing the EXCHANGE switch.  Until the inside of specimen chamber reaches an adequate vacuum (green LED (READY) is lit to indicate image observable status), images cannot be observed.

  1560 ( Code : 1560 )
Now ventilating the specimen chamber.  Please wait.
This message is displayed when the specimen chamber is open to the atmospheric air after pressing the EXCHANGE switch.  Until the inside of specimen chamber reaches the atmospheric pressure (red LED (AIR) is lit to indicate specimen exchangeable status), images cannot be observed.

  1720 ( Code : 1720 )
Re-starting up the program is required for changing the language.  Do you exit the application?
It is necessary to re-start the application for changing the language.  The application can be closed by clicking on [OK] button.  The application will start with the newly selected language when it is started again.  Changing the language can be canceled by clicking [Cancel] button.

  1781 ( Code : 1781 )
Do you start TMP (Turbo Molecular Pump) running in mode?  It takes about 30 minutes.  NOTE: Please do not turn off main switch while executing it.
This message appears if TMP running in mode is selected in the maintenance menu when the vacuum status is on AIR (red LED).  The TMP running in mode will be started by clicking [OK] button.  The TMP running in mode will not start if [Cancel] button is clicked.

  1782 ( Code : 1782 )
TMP (Turbo Molecular Pump) running in mode has been canceled.
This message appears when TMP running in mode has been canceled.  While TMP running in mode is going on, it will be stopped by clicking [Cancel] button in the message(1785).

  1783 ( Code : 1783 )
TMP (Turbo Molecular Pump) running in mode has completed.
This message appears when TMP running in mode has completed.

  1785 ( Code : 1785 )
TMP (Turbo Molecular Pump) running in mode is now going on.  Please do not shut down main power switch. (It takes about 30minutes.)
This message appears when TMP running in mode is going on. Any operation in the observation display is not available while this message is on.  Please click [Cancel] button if stopping TMP running mode is desired. As for more details, please refer to TMP(Turbo Molecular Pump) running in mode.

  1786 ( ErrCode : 1786 )
A time-out error occurred. The TMP (Turbo Molecular Pump) running in mode could not complete.  Once turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
This message appears when a time-out error occurred while TMP running in mode is going on.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
iv)  Makes the vacuum status of AIR.
If the same message appears repeatedly after restart of the system, please call our local service agent.

  1787 ( Code : 1787 )
Can not start TMP (Turbo Molecular Pump) running in mode.  Please makes the vacuum status of AIR, and execute it.
TMP running in mode can be activated when the vacuum status is in AIR.  Please makes the vacuum status of AIR by operating the EXCHANGE switch of the main unit.

  1788 ( Code : 1788 )
Please check if the specimen stage has been closed.
Please push the specimen stage lightly.  The TMP running in mode will be started by clicking [OK] button.

  1790 ( ErrCode : 1790 )
Can not evacuate.  Check if the stage is closed right.  Check if the diaphragm pump is working. Once turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
This message appears when some abnormal operation is found on the diaphragm pump while TMP running in mode is going on.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
iv)  Makes the vacuum status of AIR.
If the same message appears repeatedly after restart of the system, please call our local service agent.

  1791 ( ErrCode : 1791 )
TMP (Turbo Molecular Pump) running in mode could not complete.  Once turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
This message appears when some abnormal operation is found on TMP while TMP running in mode is going on.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
iv)  Makes the vacuum status of AIR.
If the same message appears repeatedly after restart of the system, please call our local service agent.

  1792 ( ErrCode : 1792 )
TMP (Turbo Molecular Pump) running in mode could not complete.  Once turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
This message appears when some abnormal operation is found on TMP while TMP running in mode is going on.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
iv)  Makes the vacuum status of AIR.
If the same message appears repeatedly after restart of the system, please call our local service agent.

  1796 ( ErrCode : 1796 )
A time-out error occurred. The TMP (Turbo Molecular Pump) running in mode could not complete.  Once turn off Main Power Switch, and try again.  Please call our service agent if the problem is not solved.
This message appears when a time-out error occurred while TMP running in mode is going on.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
iv)  Makes the vacuum status of AIR.
If the same message appears repeatedly after restart of the system, please call our local service agent.

  1800 ( ErrCode : 1800 )
Main Power Switch is off, or the cable is not connected.
The microscope and PC are disconnected from each other.  Make sure the power switch of control unit is turned on and the USB cable is connected.  Restart the system in the following procedure.
i)  Turn off the power switch of control unit.
ii)  Turn on the power switch of control unit.
iii)  Re-start up PC, and start up the application.
if the same message appears repeatedly after restart of the system, contact the nearest service representative.

  1801 ( ErrCode : 1801 )
Main power switch was shut down or the cable broke off while TMP (Turbo Molecular Pump) running in mode was going on.  Please re-start the program.
The electric connection between control unit and PC was disconnected while TMP running in mode was going on. Please confirm that mains witch of control unit is on and USB cable is connected right.  Re-start up PC, and Start up the application.  If the message appears repeatedly despite re-starting PC and the application, please call our local service agent.
Do not turn off the power switch of the main unit while the TMP is under running-in mode.  The TMP may be damaged due to the abrupt termination, and may not run normally.

  1900 ( Code : 1900 )
Do you close the application ?
This message is displayed for confirming closure of this application.  When clicking the [OK] button, closing process starts.  And when clicking the [Cancel] button, closing stops.

  1950 ( Code : 1950 )
Now closing the application.  Please wait.
This message is displayed for informing that the application is under closure.  After closure of the application, turn off the power supply switch of control unit.  If an error occurs during closure of the application, the data in the initial file may be broken.