A brief overview of the Nanolab's available equipment after the tour Oct. 19 2019 w/ HT, Sig & Johannes that Brynjar from Timini Labs kindly gave us! 

Prefixes:

[A] : Available for student use

nothing : maybe not

Gear:

CVD: 

• Graphene Square TCVD-D100CA, 4'' Quartz furnace LPCVD for carbon allotrope growth 
  • ~1,100℃ Process temp
  • Optimized for graphene, CNT, h-BN and TMDC growth
• Ultratech Savannah G2 Fully integrated ALD-in-a-box. 

Coaters:

• Cressington 208C Thermal Carbon Evaporator
• [A] Cressington 208HR 5-source sputter coater 
• Cressington 308R Dual Sputtering/Thermal Evaporator

Wire Bonder

• TPT HB05 Bonder
  • Wedge, Ball, Bump & Ribbon Bonder
  • Fully motorized

Microscopes:

• Hitachi S5500 FESEM
  • 2.000.000x Mag. 
  • SEM/TEM
• Reinshaw inVia Confocal Raman Optical Microscope
• Helios NanoLab DualBeam 600 SEM/FIB 
• Helios G4 UX (S)TEM / APT
• Hitachi TM3000 SEM
• [A] JEOL JSM-6480LV SEM, Timini Labs' sin egen sem. 
• Nanosurf Naiostm AFM/STM

Lithography machines

• Elionix ELS-G100 direct write E-Beam system
  • Horrifyingly expensive
  • 6nm FS, 1cm^2 /20h write speed at 30nm

Saws: 

• [A] Disco DAD3220 CNC Dicing Saw
• [A] Dynatex DX-III Scriber/Breaker

Etching:

• Dry/Wet etching sections (did not see)
• Oxford Instruments Ionfab 300Plus IBE/RIBE Ion Beam etch