Donated to OV by the Department of Electronic Systems (IES) on 2019-02-26, after being kept in storage since around 2000.

Built as an evaporation- and electron beam coating/deposition machine, it is also used as a general purpose vaccuum chamber and as the basis of OV's vacuum laboratory. The chamber volume is 240L.

Specifications

• Volume: 240L
• Internal Height:
• Internal Diameter:
• Achieved minimum pressure: 30 μBar (roughing only, WIP)
• Target minimum pressure: 10^-8 bar
• Achieved Temperature on GM-cooler: 12K. ~8°K possible.
  

• 10kW e-Beam deposition source, w/ 3 26mm watercooled crucibles
• Dual 5kW Thermal evaporation sources 

Supported Applications

• Electron beam deposition (Not Yet Available)
• Thermal Evaporation Deposition
• Low pressure, low temperature environmental testing

Documentation

PDFs

sometime soon™

Supply breaker

Ratings:

Voltage: 400V
Continuous: 63A
Instantaneous: 3.0x (189A)

Images