Donated to OV by the Department of Electronic Systems (IES) on 2019-02-26, after being kept in storage since around 2000.

Built as an evaporation- and electron beam coating/deposition machine, it is also used as a general purpose vaccuum chamber and as the basis of OV's vaccuum laboratory. The chamber volume is 240L.

Specifications

• Volume: 240L
• Internal Height:
• Internal Diameter:
• Achieved minimum pressure: 30 μBar (roughing only, WIP)
• Target minimum pressure: 10^-8 bar
• Minimum temperature on GM-cooler: ~8°K

• 10kW e-Beam deposition source, w/ 3 26mm watercooled crucibles
• Dual 5kW Thermal evaporation sources 

Supported Applications (not available yet)

• Electron beam deposition
• Evaporation deposition
• Low pressure, low temperature environmental testing

Documentation

PDFs plox - oof, so much scanning

Images