Work in Progress
The chamber is currently being installed and configured
Donated to OV by the Department of Electronic Systems (IES) on 2019-02-26, after being kept in storage since around 2000.
Built as an evaporation- and electron beam coating/deposition machine, it is also used as a general purpose vaccuum chamber and as the basis of OV's vaccuum laboratory. The chamber volume is 240L.
Specifications
- Volume: 240L
- Internal Height:
- Internal Diameter:
- Achieved minimum pressure: 30 μBar (roughing only, WIP)
- Target minimum pressure: 10-8 bar
- Minimum temperature: 7°K?
Supported Applications (not available yet)
- Electron beam deposition
- Evaporation deposition
- Low pressure, low temperature environmental testing
Documentation
PDFs plox