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The chamber is currently being installed and configuredAs of Feb. 2023: The Chamber is now operational for Thermal Evaporation, work on E-Beam deposition ongoing. |
Donated to OV by the Department of Electronic Systems (IES) on 2019-02-26, after being kept in storage since around 2000.
Built as an evaporation- and electron beam coating/deposition machine, it is also used as a general purpose vaccuum chamber and as the basis of OV's vaccuum vacuum laboratory. The chamber volume is 240L.
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- Volume: 240L
- Internal Height:
- Internal Diameter:
- Achieved minimum pressure: 30 μBar (roughing only, WIP)
- Target minimum pressure: 10-8 bar
- Minimum temperature Achieved Temperature on GM-cooler: 12K. ~8°K possible.
- 10kW e-Beam deposition source, w/ 3 26mm watercooled crucibles
- Dual 5kW Thermal evaporation sources
Supported Applications
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- Electron beam deposition (Not Yet Available)
- Thermal Evaporation depositionDeposition
- Low pressure, low temperature environmental testing
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