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• Volume: 240L
• Internal Height:
• Internal Diameter:
• Achieved minimum pressure: 30 μBar (roughing only, WIP)
• Target minimum pressure: 10^-8 bar
• Minimum temperature on GM-cooler: 7~8°K?

• 10kW e-Beam deposition source, w/ 3 26mm watercooled crucibles
• Dual 5kW Thermal evaporation sources 

Supported Applications (not available yet)

• Electron beam deposition
• Evaporation deposition
• Low pressure, low temperature environmental testing

Documentation

PDFs plox - oof, so much scanning

Images