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Built as an evaporation- and electron beam coating/deposition machine, it is also used as a general purpose vaccuum chamber and as the basis of OV's vaccuum laboratory. The chamber volume is 240L.

Specifications

• Volume: 240L
• Internal Height:
• Internal Diameter:
• Achieved minimum pressure: N/A, WIP
• Target minimum pressure: 10^-8 - 10^-9 bar
• Minimum temperature: 7°K?

Supported Applications (not available yet)

• Electron beam deposition
• Evaporation deposition
• Low pressure, low temperature environmental testing

Documentation

PDFs plox

Images