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[A] : Available for student use

nothing : maybe not

Gear:

CVD: 

  • Graphene Square TCVD-D100CA, 4'' Quartz furnace LPCVD for carbon allotrope growth 
    • ~1,100℃ Process temp
    • Optimized for graphene, CNT, h-BN and TMDC growth
  • Ultratech Savannah G2 Fully integrated ALD-in-a-box. 

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  • Hitachi S5500 FESEM
    • 2.000.000x Mag. 
    • SEM/TEM
  • Reinshaw inVia Confocal Raman Optical Microscope
  • Helios NanoLab DualBeam 600 SEM/FIB 
  • Helios G4 UX (S)TEM / APT
  • Hitachi TM3000 SEM
  • [A] JEOL JSM-6480LV SEM, Timini Labs' sin egen sem. 
  • Nanosurf Naiostm AFM/STM


Lithography machines

  • Elionix ELS-G100 direct write E-Beam system
    • Horrifyingly expensive
    • 6nm FS, 1cm^2 /20h write speed at 30nm


Saws: 

  • [A] Disco DAD3220 CNC Dicing Saw
  • [A] Dynatex DX-III Scriber/Breaker


Etching:

  • Dry/Wet etching sections (did not see)
  • Oxford Instruments Ionfab 300Plus IBE/RIBE Ion Beam etch

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