Cryopump System:
Regeneration Controller Connections
J1: Valve Control
- 1:
- 2:
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J2: Heater
- 1:
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J3: Remote Valve Control
- 1:
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J4: Compressor
- 1: NC
- 2: Compressor Remote Start
- 3: Compressor Cooling Switch
J5: Sensor/Remote
- 1:
- 2:
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- 6:
J6: Test
- 1:
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